Inventor · disambiguated record
Miki Egami
Also filed as: EGAMI MIKI
21 granted patents·3 pending applications·110 citations·filing 1997–2023
93Inventor score
Files withJGC CATALYSTS & CHEMICALS LTD14CATALYSTS & CHEM IND CO5EGAMI MIKI2FUJITSU LTD1NAKASHIMA AKIRA1
Top patents by PatentIndex Score
24 records- 0183US6451436B1Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a filmCATALYSTS & CHEM IND CO·Filed 2000·Granted Sep 17, 2002·29 cites·23 claims
- 0282US12134563B2Porous silica particles and method for producing sameJGC CATALYSTS & CHEMICALS LTD·Filed 2018·Granted Nov 5, 2024·1 cites·4 claims
- 0375US8227028B2Method for forming amorphous silica-based coating film with low dielectric constant and thus obtained amorphous silica-based coating filmEGAMI MIKI·Filed 2007·Granted Jul 24, 2012·5 cites·16 claims
- 0475US6261357B1Coating liquid for forming low-permittivity silica film and substrate having low-permittivity coating filmCATALYSTS & CHEM IND CO·Filed 1997·Granted Jul 17, 2001·32 cites·20 claims
- 0574US7998567B2Coating liquid for formation of protective film for semiconductor processing and method for preparation of the sameJGC CATALYSTS & CHEMICALS LTD·Filed 2005·Granted Aug 16, 2011·5 cites·16 claims
- 0671US10358353B2Method for producing disintegrated silica particlesJGC CATALYSTS & CHEMICALS LTD·Filed 2014·Granted Jul 23, 2019·1 cites·17 claims
- 0771US6716773B2Process for producing semiconductor substratesCATALYSTS & CHEM IND CO·Filed 2002·Granted Apr 6, 2004·14 cites·10 claims
- 0869US8686101B2Coating liquid for forming low dielectric constant amorphous silica-based coating film and the coating film obtained from the sameEGAMI MIKI·Filed 2006·Granted Apr 1, 2014·4 cites·14 claims
- 0966US12187618B2Silica particle dispersion liquid and production method thereofJGC CATALYSTS & CHEMICALS LTD·Filed 2020·Granted Jan 7, 2025·0 cites·6 claims
- 1066US6599846B2Method of forming a silica-containing coating film with a low dielectric constant and semiconductor substrate coated with such a filmCATALYSTS & CHEM IND CO·Filed 2000·Granted Jul 29, 2003·10 cites·20 claims
- 1163US11542167B2Silica particle dispersion liquid and production method thereofJGC CATALYSTS & CHEMICALS LTD·Filed 2020·Granted Jan 3, 2023·0 cites·5 claims
- 1262US10184069B2Silica-based polishing particle and abrasiveJGC CATALYSTS & CHEMICALS LTD·Filed 2017·Granted Jan 22, 2019·0 cites·7 claims
- 1361US7232769B2Method of forming amorphous silica-based coating film with low dielectric constant and thus obtained silica-based coating filmFUJITSU LTD·Filed 2003·Granted Jun 19, 2007·7 cites·32 claims
- 1459US10301183B2Silica particle dispersion and production method of the sameJGC CATALYSTS & CHEMICALS LTD·Filed 2017·Granted May 28, 2019·0 cites·4 claims
- 1559US10190023B2Silica-based polishing particle and abrasiveJGC CATALYSTS & CHEMICALS LTD·Filed 2017·Granted Jan 29, 2019·0 cites·11 claims
- 1656US2025171317A1Porous silica particles and method for producing sameJGC CATALYSTS & CHEMICALS LTD·Filed 2023·Application pending·0 cites
- 1753US11427730B2Dispersion liquid of silica particles and production method thereforJGC CATALYSTS & CHEMICALS LTD·Filed 2018·Granted Aug 30, 2022·0 cites·6 claims
- 1850US11492513B2Dispersion liquid of silica particles, polishing composition, and method for producing dispersion liquid of silica particlesJGC CATALYSTS & CHEMICALS LTD·Filed 2019·Granted Nov 8, 2022·0 cites·4 claims
- 1947US11254580B2Silica particle liquid dispersion and production method thereforJGC CATALYSTS & CHEMICALS LTD·Filed 2018·Granted Feb 22, 2022·0 cites·17 claims
- 2047US8062414B2Coating liquid for forming amorphous silica-based coating film with low dielectric constantNAKASHIMA AKIRA·Filed 2003·Granted Nov 22, 2011·2 cites·18 claims
- 2145US11613683B2Method for producing chain-like particle dispersion, and dispersion of chain-like particlesJGC CATALYSTS & CHEMICALS LTD·Filed 2018·Granted Mar 28, 2023·0 cites·5 claims
- 2243US11312634B2Production method for dispersion liquid of silica particleJGC CATALYSTS & CHEMICALS LTD·Filed 2018·Granted Apr 26, 2022·0 cites·16 claims
- 2340US2008011987A1Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film, Method for Preparing the Same, and Low Dielectric Constant Amorphous Silica-Based Coating Film Obtained From the SameCATALYSTS & CHEM IND CO·Filed 2005·Application pending·0 cites
- 2435US2013109072A1Support for protein immobilization, immobilized protein, and methods for producing the sameTSUNODA TATSUO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →