Inventor · disambiguated record
Michael Fury
Also filed as: FURY MICHAEL · FURY MICHAEL A
10 granted patents·4 pending applications·310 citations·filing 1981–2007
92Inventor score
Top patents by PatentIndex Score
14 records- 0193US6566276B2Method of making electronic materialsEKC TECHNOLOGY INC·Filed 2001·Granted May 20, 2003·85 cites·46 claims
- 0292US7361231B2System and method for mid-pressure dense phase gas and ultrasonic cleaningEKC TECHNOLOGY INC·Filed 2005·Granted Apr 22, 2008·36 cites·11 claims
- 0385US6696363B2Method of and apparatus for substrate pre-treatmentEKC TECHNOLOGY INC·Filed 2001·Granted Feb 24, 2004·30 cites·35 claims
- 0482US6464740B1Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materialsHONEYWELL INT INC·Filed 2000·Granted Oct 15, 2002·36 cites·27 claims
- 0578US7074640B2Method of making barrier layersUNIV FRASER SIMON·Filed 2003·Granted Jul 11, 2006·22 cites·17 claims
- 0677US4340618AProcess for forming refractory metal layers on ceramic substrateIBM·Filed 1981·Granted Jul 20, 1982·28 cites·12 claims
- 0773US6723143B2Reactive aqueous metal oxide sols as polishing slurries for low dielectric constant materialsHONEYWELL INT INC·Filed 2002·Granted Apr 20, 2004·18 cites·58 claims
- 0867US7226512B2Load lock system for supercritical fluid cleaningEKC TECHNOLOGY INC·Filed 2003·Granted Jun 5, 2007·11 cites·14 claims
- 0963US5284549ASelective fluorocarbon-based RIE process utilizing a nitrogen additiveIBM·Filed 1992·Granted Feb 8, 1994·36 cites·6 claims
- 1060US6857437B2Automated dense phase fluid cleaning systemEKC TECHNOLOGY INC·Filed 2003·Granted Feb 22, 2005·8 cites·16 claims
- 1147US2007246074A1Load lock system for supercritical fluid cleaningFURY MICHAEL A·Filed 2007·Application pending·0 cites
- 1244US2005285312A1Use of PMOD materials in layered (3D) manufacturing technologyFURY MICHAEL A·Filed 2004·Application pending·0 cites
- 1341US2004180292A1Apparatus for substrate pre-treatmentEKC TECHNOLOGY INC·Filed 2003·Application pending·0 cites
- 1435US2004244818A1System and method for cleaning of workpieces using supercritical carbon dioxideFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →