Inventor · disambiguated record
Mineo Gotou
Also filed as: GOTOU MINEO
5 granted patents·141 citations·filing 1983–1988
83Inventor score
Top patents by PatentIndex Score
5 records- 0188US4948979AVacuum device for handling workpiecesTOSHIBA KK·Filed 1988·Granted Aug 14, 1990·67 cites·10 claims
- 0273US4621371AMethod of forming by projection an integrated circuit pattern on a semiconductor waferTOKYO SHIBAURA ELECTRIC CO·Filed 1984·Granted Nov 4, 1986·26 cites·10 claims
- 0362US4728797AMethod for drawing a pattern by charged beam and its apparatusTOSHIBA KK·Filed 1986·Granted Mar 1, 1988·13 cites·6 claims
- 0455US4636968AMethod of positioning a beam to a specific portion of a semiconductor waferTOSHIBA KK·Filed 1984·Granted Jan 13, 1987·20 cites·10 claims
- 0548US4558225ATarget body position measuring method for charged particle beam fine pattern exposure systemTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Dec 10, 1985·15 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →