Inventor · disambiguated record
Michio Hatano
Also filed as: HATANO MICHIO
20 granted patents·5 pending applications·88 citations·filing 2005–2021
93Inventor score
Top patents by PatentIndex Score
25 records- 0190US9029766B2Scanning electron microscopeMORISHITA HIDEO·Filed 2012·Granted May 12, 2015·15 cites·14 claims
- 0290US7755045B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 13, 2010·14 cites·15 claims
- 0390US7511271B2Scanning electron microscopeHITACHI SCIENCE SYSTEMS LTD·Filed 2005·Granted Mar 31, 2009·12 cites·16 claims
- 0490US7504624B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 17, 2009·13 cites·20 claims
- 0587US8629395B2Charged particle beam apparatusMORISHITA HIDEO·Filed 2011·Granted Jan 14, 2014·10 cites·17 claims
- 0681US11538659B2Charged particle beam device, autofocus processing method of charged particle beam device, and detectorHITACHI HIGH TECH CORP·Filed 2018·Granted Dec 27, 2022·2 cites·29 claims
- 0780US8217363B2Scanning electron microscopeHATANO MICHIO·Filed 2008·Granted Jul 10, 2012·6 cites·5 claims
- 0878US11348757B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2018·Granted May 31, 2022·2 cites·14 claims
- 0978US9472376B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted Oct 18, 2016·4 cites·10 claims
- 1074US11348758B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted May 31, 2022·2 cites·11 claims
- 1172US9208994B2Electron beam apparatus for visualizing a displacement of an electric fieldOHSHIMA TAKASHI·Filed 2011·Granted Dec 8, 2015·3 cites·17 claims
- 1267US9202667B2Charged particle radiation device with bandpass detectionHATANO MICHIO·Filed 2010·Granted Dec 1, 2015·2 cites·11 claims
- 1366US10755396B2Image forming apparatusHITACHI LTD·Filed 2018·Granted Aug 25, 2020·1 cites·12 claims
- 1465US8097848B2Scanning electron microscopeHATANO MICHIO·Filed 2009·Granted Jan 17, 2012·2 cites·20 claims
- 1558US2010090109A1Scanning electron microscopeHATANO MICHIO·Filed 2009·Application pending·0 cites
- 1653US12265041B2Thin film damage detection function and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Apr 1, 2025·0 cites·11 claims
- 1751US10262830B2Scanning electron microscope and electron trajectory adjustment method thereforHITACHI LTD·Filed 2014·Granted Apr 16, 2019·0 cites·12 claims
- 1851US2009101817A1Charged particle application apparatusOHSHIMA TAKASHI·Filed 2008·Application pending·0 cites
- 1950US2024128049A1Electron microscopeHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 2048US9521372B2Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recordedHITACHI HIGH TECH CORP·Filed 2013·Granted Dec 13, 2016·0 cites·19 claims
- 2147US12315695B2Sample holder, intermembrane distance adjustment mechanism, and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted May 27, 2025·0 cites·31 claims
- 2246US10438771B2Measurement device, calibration method of measurement device, and calibration memberHITACHI HIGH TECH CORP·Filed 2016·Granted Oct 8, 2019·0 cites·15 claims
- 2345US9245711B2Charged particle beam apparatus and image forming methodHITACHI HIGH TECH CORP·Filed 2015·Granted Jan 26, 2016·0 cites·20 claims
- 2445US2024162000A1Sample Holder and Electron MicroscopeHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 2543US2020225175A1Analyzing systemHITACHI LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →