Inventor · disambiguated record
Michael A. Huff
Also filed as: HUFF MICHAEL · HUFF MICHAEL A · HUFF MICHAEL ALAN · HUFF MICHAEL E
48 granted patents·3 pending applications·1,011 citations·filing 1990–2022
98Inventor score
Files withCORP FOR NAT RES INITIATIVES16CORPORATION FOR NATIONAL RES INITIATIVES16HUFF MICHAEL A8BOSCH GMBH ROBERT2HUFF MICHAEL2
Top patents by PatentIndex Score
51 records- 0198US6815739B2Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substratesCORP FOR NAT RES INITIATIVES·Filed 2002·Granted Nov 9, 2004·208 cites·139 claims
- 0298US5164558AMicromachined threshold pressure switch and method of manufactureMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Nov 17, 1992·237 cites·16 claims
- 0396US5238223AMethod of making a microvalveBOSCH GMBH ROBERT·Filed 1992·Granted Aug 24, 1993·148 cites·11 claims
- 0495US11927281B1Piezoelectrically-actuated microvalve device and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2022·Granted Mar 12, 2024·3 cites·52 claims
- 0593US7045440B2Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substratesCORP FOR NAT RES INITIATIVES·Filed 2003·Granted May 16, 2006·68 cites·97 claims
- 0693US5142781AMethod of making a microvalveBOSCH GMBH ROBERT·Filed 1990·Granted Sep 1, 1992·89 cites·14 claims
- 0792US11788646B1Three-way piezoelectrically-actuated microvalve device and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2022·Granted Oct 17, 2023·2 cites·19 claims
- 0892US6909589B2MEMS-based variable capacitorCORP FOR NAT RES INITIATIVES·Filed 2003·Granted Jun 21, 2005·64 cites·102 claims
- 0989US8660157B2Means for improved implementation of laser diodes and laser diode arraysHUFF MICHAEL A·Filed 2012·Granted Feb 25, 2014·9 cites·66 claims
- 1088US8304324B2Low-temperature wafer bonding of semiconductors to metalsHUFF MICHAEL·Filed 2008·Granted Nov 6, 2012·22 cites·161 claims
- 1187US10323772B2Three-way microvalve device and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2015·Granted Jun 18, 2019·4 cites·30 claims
- 1287US7012327B2Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substratesCORP FOR NAT RES INITIATIVES·Filed 2004·Granted Mar 14, 2006·40 cites·33 claims
- 1386US7188530B2Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressureCORP FOR NAT RES INITIATIVES·Filed 2004·Granted Mar 13, 2007·24 cites·31 claims
- 1484US9053929B1Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress statesHUFF MICHAEL A·Filed 2011·Granted Jun 9, 2015·8 cites·34 claims
- 1584US7024936B2Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressureCORP FOR NAT RES INITIATIVES·Filed 2003·Granted Apr 11, 2006·22 cites·21 claims
- 1680US10403463B2Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devicesCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2017·Granted Sep 3, 2019·2 cites·65 claims
- 1780US6622558B2Method and sensor for detecting strain using shape memory alloysORBITAL RES INC·Filed 2000·Granted Sep 23, 2003·17 cites·13 claims
- 1879US9852870B2Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devicesOZGUR MEHMET·Filed 2011·Granted Dec 26, 2017·5 cites·65 claims
- 1978US11326717B1Three-way piezoelectrically-actuated microvalve device and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2018·Granted May 10, 2022·2 cites·20 claims
- 2074US7017419B2Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressureCORP FOR NAT RES INITIATIVES·Filed 2004·Granted Mar 28, 2006·13 cites·21 claims
- 2173US11035496B2Three-way microvalve device and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2019·Granted Jun 15, 2021·1 cites·19 claims
- 2272US11049725B1Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitrideCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2014·Granted Jun 29, 2021·2 cites·87 claims
- 2369US11984321B1Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitrideCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2021·Granted May 14, 2024·0 cites·45 claims
- 2469US8852378B2Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devicesHUFF MICHAEL A·Filed 2009·Granted Oct 7, 2014·5 cites·34 claims
- 2568US9646878B2Method for fabricating and manufacturing micro—and nano-fabricated devices and systems securelyCORP FOR NAT RES INITIATIVES·Filed 2014·Granted May 9, 2017·2 cites·16 claims
- 2668US9536706B2Self-aligned dynamic pattern generator device and method of fabricationCORP FOR NAT RES INITIATIVES·Filed 2016·Granted Jan 3, 2017·1 cites·19 claims
- 2767US8270081B2Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objectsHUFF MICHAEL A·Filed 2008·Granted Sep 18, 2012·4 cites·44 claims
- 2866US8790534B2System and method for precision fabrication of micro- and nano-devices and structuresHUFF MICHAEL A·Filed 2011·Granted Jul 29, 2014·1 cites·59 claims
- 2964US10910185B2Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devicesCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2019·Granted Feb 2, 2021·0 cites·50 claims
- 3063US9576773B2Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materialsCORP FOR NAT RES INITIATIVES·Filed 2013·Granted Feb 21, 2017·1 cites·192 claims
- 3161US12194464B1Integrated microfluidic system and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2022·Granted Jan 14, 2025·0 cites·7 claims
- 3261US7679042B1Fabrication of transducer structuresFLUSBERG ALLEN M·Filed 2007·Granted Mar 16, 2010·1 cites·13 claims
- 3360US8983414B2Versatile communication system and method of implementation using heterogeneous integrationCORP FOR NAT RES INITIATIVES·Filed 2013·Granted Mar 17, 2015·1 cites·44 claims
- 3460US8243766B2Means for improved implementation of laser diodes and laser diode arraysHUFF MICHAEL·Filed 2008·Granted Aug 14, 2012·1 cites·19 claims
- 3559US12263376B1Microsensors applied to athletes bodies in order to provide real-time feedback about sport-specific technique for sport performance improvementsCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2021·Granted Apr 1, 2025·0 cites·31 claims
- 3658US8007695B2Method of fabricating small dimensioned lens elements and lens arrays using surface tension effectsCORP FOR NAT RES INITIATIVES·Filed 2009·Granted Aug 30, 2011·0 cites·47 claims
- 3757US7994463B1Fabrication of transducer structuresCORP FOR NAT RES INITIATIVES·Filed 2010·Granted Aug 9, 2011·0 cites·15 claims
- 3856US11075086B1Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitrideCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2018·Granted Jul 27, 2021·0 cites·54 claims
- 3954US12297529B1Method and system for controlling the state of stress in deposited thin filmsCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2019·Granted May 13, 2025·0 cites·73 claims
- 4054US11926522B1Packaging of microfluidic devices and microfluidic integrated systems and method of fabricationCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2022·Granted Mar 12, 2024·0 cites·13 claims
- 4152US12478962B1Low-cost microfluidic devices and systems and method of manufacturingCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2022·Granted Nov 25, 2025·0 cites·13 claims
- 4252US11990344B2Low-cost method of making a hard mask for high resolution and low dimensional variations for the fabrication and manufacturing of micro- and nano-devices and -systemsCORPORATION FOR NATIONAL RES INITIATIVES·Filed 2021·Granted May 21, 2024·0 cites·15 claims
- 4351US9312103B2Self-aligned dynamic pattern generator device and method of fabricationCORP FOR NAT RES INITIATIVES·Filed 2013·Granted Apr 12, 2016·0 cites·46 claims
- 4449US9099248B2Variable capacitor tuned using laser micromachiningHUFF MICHAEL A·Filed 2008·Granted Aug 4, 2015·0 cites·19 claims
- 4548US2005161753A1Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substratesCORP FOR NAT RES INITIATIVES·Filed 2005·Application pending·0 cites
- 4647US9019686B2Variable capacitor tuned using laser micromachiningHUFF MICHAEL A·Filed 2012·Granted Apr 28, 2015·0 cites·25 claims
- 4745US2006235330A1Apparatus and method of identifying and managing moodHUFF MICHAEL E·Filed 2005·Application pending·0 cites
- 4843US11995989B2Visualization of planned autonomous vehicle behaviorGM CRUISE HOLDINGS LLC·Filed 2020·Granted May 28, 2024·0 cites·20 claims
- 4941US7052926B2Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology methodCORP FOR NAT RES INITIATIVES·Filed 2004·Granted May 30, 2006·4 cites·28 claims
- 5039US8895338B2Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systemsHUFF MICHAEL A·Filed 2011·Granted Nov 25, 2014·0 cites·53 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →