Inventor · disambiguated record
Mikio Ichihashi
Also filed as: ICHIHASHI MIKIO
37 granted patents·1 pending application·916 citations·filing 1984–2012
98Inventor score
Top patents by PatentIndex Score
38 records- 0193US6348690B1Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 1998·Granted Feb 19, 2002·51 cites·30 claims
- 0291US5866905AElectron microscopeHITACHI LTD·Filed 1996·Granted Feb 2, 1999·74 cites·12 claims
- 0390US6822233B2Method and apparatus for scanning transmission electron microscopyHITACHI LTD·Filed 2003·Granted Nov 23, 2004·31 cites·1 claims
- 0490US6531697B1Method and apparatus for scanning transmission electron microscopyHITACHI LTD·Filed 1999·Granted Mar 11, 2003·59 cites·9 claims
- 0590US6051834AElectron microscopeHITACHI LTD·Filed 1998·Granted Apr 18, 2000·65 cites·2 claims
- 0689US6750451B2Observation apparatus and observation method using an electron beamHITACHI LTD·Filed 2002·Granted Jun 15, 2004·32 cites·5 claims
- 0789US5324950ACharged particle beam apparatusHITACHI LTD·Filed 1992·Granted Jun 28, 1994·59 cites·38 claims
- 0888US5442183ACharged particle beam apparatus including means for maintaining a vacuum sealHITACHI LTD·Filed 1993·Granted Aug 15, 1995·47 cites·9 claims
- 0987US7012252B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Mar 14, 2006·5 cites·12 claims
- 1087US5783830ASample evaluation/process observation system and methodHITACHI LTD·Filed 1997·Granted Jul 21, 1998·85 cites·9 claims
- 1186US5187371ACharged particle beam apparatusHITACHI LTD·Filed 1991·Granted Feb 16, 1993·55 cites·50 claims
- 1286US4600839ASmall-dimension measurement system by scanning electron beamHITACHI LTD·Filed 1984·Granted Jul 15, 1986·35 cites·4 claims
- 1385US6452178B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2001·Granted Sep 17, 2002·23 cites·16 claims
- 1485US5254856ACharged particle beam apparatus having particular electrostatic objective lens and vacuum pump systemsHITACHI LTD·Filed 1991·Granted Oct 19, 1993·43 cites·57 claims
- 1580US7439506B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2007·Granted Oct 21, 2008·3 cites·30 claims
- 1678US5552602AElectron microscopeHITACHI LTD·Filed 1995·Granted Sep 3, 1996·41 cites·28 claims
- 1778US4767926AElectron beam metrology systemHITACHI LTD·Filed 1986·Granted Aug 30, 1988·23 cites·2 claims
- 1877US5229607ACombination apparatus having a scanning electron microscope thereinHITACHI LTD·Filed 1991·Granted Jul 20, 1993·47 cites·29 claims
- 1974US6512227B2Method and apparatus for inspecting patterns of a semiconductor device with an electron beamHITACHI LTD·Filed 2001·Granted Jan 28, 2003·10 cites·17 claims
- 2074US4670652ACharged particle beam microprobe apparatusHITACHI LTD·Filed 1985·Granted Jun 2, 1987·19 cites·2 claims
- 2171US6987265B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2002·Granted Jan 17, 2006·9 cites·12 claims
- 2270US5373158AField-emission transmission electron microscope and operation method thereofHITACHI LTD·Filed 1993·Granted Dec 13, 1994·21 cites·4 claims
- 2370US5153434AElectron microscope and method for observing microscopic imageHITACHI LTD·Filed 1991·Granted Oct 6, 1992·21 cites·42 claims
- 2464US5442182AElectron lensHITACHI LTD·Filed 1993·Granted Aug 15, 1995·16 cites·29 claims
- 2560US8134125B2Method and apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2008·Granted Mar 13, 2012·0 cites·18 claims
- 2660US7385198B2Method and apparatus for measuring the physical properties of micro regionHITACHI LTD·Filed 2006·Granted Jun 10, 2008·1 cites·11 claims
- 2760US4751384AElectron beam metrology systemHITACHI LTD·Filed 1987·Granted Jun 14, 1988·10 cites·1 claims
- 2860US4605860AApparatus for focusing a charged particle beam onto a specimenHITACHI LTD·Filed 1984·Granted Aug 12, 1986·9 cites·6 claims
- 2959US7351944B2Beam irradiation deviceSANYO ELECTRIC CO·Filed 2005·Granted Apr 1, 2008·4 cites·10 claims
- 3059US7232996B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Jun 19, 2007·0 cites·12 claims
- 3157US8604430B2Method and an apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2012·Granted Dec 10, 2013·0 cites·6 claims
- 3253US7022988B2Method and apparatus for measuring physical properties of micro regionHITACHI LTD·Filed 2001·Granted Apr 4, 2006·4 cites·4 claims
- 3347US5134289AField emission electron device which produces a constant beam currentHITACHI LTD·Filed 1990·Granted Jul 28, 1992·7 cites·16 claims
- 3439US8669535B2Electron gunICHIHASHI MIKIO·Filed 2010·Granted Mar 11, 2014·0 cites·16 claims
- 3535US4740693AElectron beam pattern line width measurement systemHITACHI LTD·Filed 1985·Granted Apr 26, 1988·4 cites·6 claims
- 3634US4772821AApparatus for introducing oxygen gasHITACHI LTD·Filed 1986·Granted Sep 20, 1988·2 cites·4 claims
- 3734US2013087703A1Electron microscopeONISHI TAKASHI·Filed 2011·Application pending·0 cites
- 3828US5813776APrinting method and printing apparatus using split seal paper sheetsSANYO ELECTRIC CO·Filed 1997·Granted Sep 29, 1998·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →