Inventor · disambiguated record
Michael Junghähnel
Also filed as: JUNGHAEHNEL MICHAEL · JUNGHÄHNEL MICHAEL
5 granted patents·165 citations·filing 1997–2012
83Inventor score
Top patents by PatentIndex Score
5 records- 0185US6063245AMagnetron sputtering method and apparatus utilizing a pulsed energy patternIBM·Filed 1997·Granted May 16, 2000·85 cites·43 claims
- 0283US6340416B1Process and system for operating magnetron dischargesFRAUNHOFER GES FORSCHUNG·Filed 1998·Granted Jan 22, 2002·48 cites·25 claims
- 0368US9443703B2Apparatus for generating a hollow cathode arc discharge plasmaFRAUNHOFER GES FORSCHUNG·Filed 2012·Granted Sep 13, 2016·4 cites·14 claims
- 0466US6019876APulsed DC sputtering method of thin film magnetic disksIBM·Filed 1998·Granted Feb 1, 2000·20 cites·16 claims
- 0556US6605312B2Method of producing a thin-film systemFRAUNHOFER GESELLSCHAFTT ZUR F·Filed 2001·Granted Aug 12, 2003·8 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →