Inventor · disambiguated record
Michihiro Kawaguchi
Also filed as: KAWAGUCHI MICHIHIRO
12 granted patents·1 pending application·16 citations·filing 2010–2022
84Inventor score
Top patents by PatentIndex Score
13 records- 0181US9299531B2Mask cover, charged particle beam drawing apparatus and charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Mar 29, 2016·7 cites·12 claims
- 0277US8847178B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2012·Granted Sep 30, 2014·4 cites·17 claims
- 0375US10373793B2Conductive contact point pin and charged particle beam apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Aug 6, 2019·2 cites·17 claims
- 0461US9895513B2CatheterTERUMO CORP·Filed 2015·Granted Feb 20, 2018·1 cites·20 claims
- 0561US8987683B2Charged particle beam drawing apparatus and charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Mar 24, 2015·1 cites·20 claims
- 0655US12142512B2Vacuum apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Granted Nov 12, 2024·0 cites·10 claims
- 0755US8779397B2Substrate cover and charged particle beam writing method using sameKAWAGUCHI MICHIHIRO·Filed 2010·Granted Jul 15, 2014·1 cites·6 claims
- 0846US11049688B2Charged particle beam irradiation apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 0942US2019015628A1CatheterTERUMO CORP·Filed 2018·Application pending·0 cites
- 1041US10607810B2Vibration control system and optical equipment equipped therewithNUFLARE TECHNOLOGY INC·Filed 2019·Granted Mar 31, 2020·0 cites·16 claims
- 1141US10129985B2Substrate coverNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 13, 2018·0 cites·12 claims
- 1239US8912513B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Dec 16, 2014·0 cites·8 claims
- 1333US8237139B2Method for detecting substrate position of charged particle beam photolithography apparatus and charged particle beam photolithography apparatusFUJIWARA KOTA·Filed 2010·Granted Aug 7, 2012·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →