Inventor · disambiguated record
Michael L. Kirk
Also filed as: KIRK MICHAEL L
3 granted patents·121 citations·filing 2002–2014
76Inventor score
Top patents by PatentIndex Score
3 records- 0193US9336995B2Multiple radio frequency power supply control of frequency and phaseMKS INSTR INC·Filed 2014·Granted May 10, 2016·20 cites·29 claims
- 0291US6707255B2Multirate processing for metrology of plasma RF sourceENI TECHNOLOGY INC·Filed 2002·Granted Mar 16, 2004·64 cites·22 claims
- 0387US6983215B2RF metrology characterization for field installation and serviceability for the plasma processing industryMKS INSTR INC·Filed 2003·Granted Jan 3, 2006·37 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →