Inventor · disambiguated record
Michael Klick
Also filed as: KLICK MICHAEL
3 granted patents·2 pending applications·87 citations·filing 1995–2016
73Inventor score
Top patents by PatentIndex Score
5 records- 0164US10867825B2Wafer boat and treatment apparatus for wafersLERCH WILFRIED·Filed 2016·Granted Dec 15, 2020·2 cites·17 claims
- 0263US5705931AMethod for determining absolute plasma parametersADOLPH SLABY INSTITUUT FORSCHU·Filed 1995·Granted Jan 6, 1998·46 cites·6 claims
- 0359US5861752AMethod and apparatus for determining of absolute plasma parametersFiled 1997·Granted Jan 19, 1999·39 cites·9 claims
- 0423US2018076070A1Plasma-treatment device for wafersLERCH WILFRIED·Filed 2016·Application pending·0 cites
- 0523US2018066354A1Wafer boat and plasma treatment device for wafersCENTROTHERM PHOTOVOLTAICS AG·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →