Inventor · disambiguated record
Michael Kotelyanskii
Also filed as: KOTELYANSKII MICHAEL · KOTELYANSKII MICHAEL J
10 granted patents·6 pending applications·60 citations·filing 2004–2024
86Inventor score
Files withONTO INNOVATION INC4RUDOLPH TECHNOLOGIES INC4MEHENDALE MANJUSHA2RUDOLPH TECH INC2WOLF ROBERT GREGORY2
Top patents by PatentIndex Score
16 records- 0189US8139232B2Multiple measurement techniques including focused beam scatterometry for characterization of samplesWOLF ROBERT GREGORY·Filed 2007·Granted Mar 20, 2012·19 cites·21 claims
- 0285US9576862B2Optical acoustic substrate assessment system and methodRUDOLPH TECH INC·Filed 2014·Granted Feb 21, 2017·8 cites·9 claims
- 0385US8699027B2Multiple measurement techniques including focused beam scatterometry for characterization of samplesWOLF ROBERT GREGORY·Filed 2012·Granted Apr 15, 2014·9 cites·10 claims
- 0485US2025327737A1Opto-acoustic microscopy using an instantaneous signal difference between signals from two discrete delay times acquired with a single probe beamONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 0580US9041931B2Substrate analysis using surface acoustic wave metrologyCOLGAN MICHAEL·Filed 2010·Granted May 26, 2015·7 cites·30 claims
- 0679US2025327758A1Metrology based on time resolved non-acoustic signalsONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 0778US9991176B2Non-destructive acoustic metrology for void detectionMEHENDALE MANJUSHA·Filed 2015·Granted Jun 5, 2018·3 cites·23 claims
- 0873US9140601B2Position sensitive detection optimizationMEHENDALE MANJUSHA·Filed 2012·Granted Sep 22, 2015·4 cites·11 claims
- 0968US7019845B1Measuring elastic moduli of dielectric thin films using an optical metrology systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 28, 2006·10 cites·36 claims
- 1065US2024329005A1Multi pump-probe encoding-decoding for opto-acoustic metrologyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 1159US11988641B2Characterization of patterned structures using acoustic metrologyONTO INNOVATION INC·Filed 2021·Granted May 21, 2024·0 cites·23 claims
- 1258US2014375983A1Multiple measurement techniques including focused beam scatterometry for characterization of samplesRUDOLPH TECHNOLOGIES INC·Filed 2014·Application pending·0 cites
- 1342US2006256916A1Combined ultra-fast x-ray and optical system for thin film measurementsRUDOLPH TECHNOLOGIES INC·Filed 2005·Application pending·0 cites
- 1441US7903238B2Combination of ellipsometry and optical stress generation and detectionRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Mar 8, 2011·0 cites·24 claims
- 1540US2009306941A1Structure Model description and use for scatterometry-based semiconductor manufacturing process metrologyKOTELYANSKII MICHAEL·Filed 2007·Application pending·0 cites
- 1631US10209300B2Opto-acoustic metrology of signal attenuating structuresRUDOLPH TECH INC·Filed 2016·Granted Feb 19, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →