Inventor · disambiguated record
Michael Kuechel
Also filed as: KUECHEL MICHAEL
5 granted patents·57 citations·filing 2002–2014
79Inventor score
Top patents by PatentIndex Score
5 records- 0184US6816247B1Moiré method and a system for measuring the distortion of an optical imaging systemZEISS CARL SMT AG·Filed 2002·Granted Nov 9, 2004·36 cites·22 claims
- 0276US9103649B2In situ calibration of interferometersSYKORA DANIEL M·Filed 2012·Granted Aug 11, 2015·5 cites·8 claims
- 0370US9234739B2In situ calibration of interferometersZYGO CORP·Filed 2014·Granted Jan 12, 2016·2 cites·11 claims
- 0462US6804011B2Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometerFiled 2002·Granted Oct 12, 2004·9 cites·88 claims
- 0551US6876453B2Metrology system for precision 3D motionZYGO CORP·Filed 2003·Granted Apr 5, 2005·5 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →