Inventor · disambiguated record
Michael Lubbehusen
Also filed as: LUEBBEHUSEN MICHAEL
3 granted patents·71 citations·filing 1990–1995
74Inventor score
Top patents by PatentIndex Score
3 records- 0177US6440281B1Device for the prevention of arcing in vacuum sputtering installationsUNAXIS DEUTSCHLAND HOLDING·Filed 1995·Granted Aug 27, 2002·35 cites·9 claims
- 0261US5182001AProcess for coating substrates by means of a magnetron cathodeLEYBOLD AG·Filed 1991·Granted Jan 26, 1993·18 cites·1 claims
- 0351US5069772AApparatus for coating substrates by means of a magnetron cathodeLEYBOLD AG·Filed 1990·Granted Dec 3, 1991·18 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →