Inventor · disambiguated record
Michihiro Mita
Also filed as: MITA MICHIHIRO
1 granted patent·7 pending applications·6 citations·filing 2002–2025
27Inventor score
Files withJSR CORP7
Top patents by PatentIndex Score
8 records- 0168US7556860B2Laminate and method of forming the same, insulating film, and semiconductor deviceJSR CORP·Filed 2006·Granted Jul 7, 2009·6 cites·13 claims
- 0262US2025004375A1Radiation-Sensitive Composition, Pattern Formation Method, and Photo-Degradable BaseJSR CORP·Filed 2024·Application pending·0 cites
- 0360US2024319597A1Radiation-sensitive resin composition, pattern formation method, method for manufacturing substrate, and compoundJSR CORP·Filed 2024·Application pending·0 cites
- 0460US2025164877A1Radiation-sensitive composition, method for forming resist pattern, and radiation-sensitive acid generatorJSR CORP·Filed 2025·Application pending·0 cites
- 0548US2025362596A1Radiation-sensitive composition, method for forming pattern, and radiation-sensitive acid generatorJSR CORP·Filed 2025·Application pending·0 cites
- 0634US2011123936A1Resist pattern coating agent and resist pattern-forming methodJSR CORP·Filed 2011·Application pending·0 cites
- 0733US2011223544A1Resist pattern coating agent and resist pattern forming method using the sameJSR CORP·Filed 2011·Application pending·0 cites
- 0831US2004231777A1Method and apparatus for treating organosiloxane coatingFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →