Inventor · disambiguated record
Michio Noboru
Also filed as: NOBORU MICHIO
2 granted patents·4 pending applications·19 citations·filing 2002–2015
59Inventor score
Top patents by PatentIndex Score
6 records- 0187US7884921B2Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing methodNIKON CORP·Filed 2007·Granted Feb 8, 2011·14 cites·28 claims
- 0270US8139199B2Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing methodNOBORU MICHIO·Filed 2008·Granted Mar 20, 2012·5 cites·56 claims
- 0344US2015212426A1Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing methodNIKON CORP·Filed 2015·Application pending·0 cites
- 0442US2008165333A1Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing methodNIKON CORP·Filed 2007·Application pending·0 cites
- 0542US2012176590A1Exposure Method, Exposure Apparatus, Light Converging Pattern Formation Member, Mask, and Device Manufacturing MethodNOBORU MICHIO·Filed 2012·Application pending·0 cites
- 0633US2005041226A1Method and device for exposure control, method and device for exposure, and method of manufacture of deviceNIKON CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →