Inventor · disambiguated record
Michael Offenberg
Also filed as: OFFENBERG MICHAEL
37 granted patents·1,953 citations·filing 1992–2009
98Inventor score
Top patents by PatentIndex Score
37 records- 0199US5683591AProcess for producing surface micromechanical structuresBOSCH GMBH ROBERT·Filed 1994·Granted Nov 4, 1997·271 cites·12 claims
- 0298US5578755AAccelerometer sensor of crystalline material and method for manufacturing the sameBOSCH GMBH ROBERT·Filed 1994·Granted Nov 26, 1996·206 cites·7 claims
- 0395US5723353AProcess for manufacturing a sensorBOSCH GMBH ROBERT·Filed 1996·Granted Mar 3, 1998·106 cites·11 claims
- 0495US5616514AMethod of fabricating a micromechanical sensorBOSCH GMBH ROBERT·Filed 1995·Granted Apr 1, 1997·109 cites·16 claims
- 0594US5756901ASensor and method for manufacturing a sensorBOSCH GMBH ROBERT·Filed 1996·Granted May 26, 1998·94 cites·8 claims
- 0693US6318175B1Micromechanical sensor and method for the manufacture thereofBOSCH GMBH ROBERT·Filed 2000·Granted Nov 20, 2001·76 cites·12 claims
- 0791US6214243B1Process for producing a speed of rotation coriolis sensorBOSCH GMBH ROBERT·Filed 1996·Granted Apr 10, 2001·78 cites·14 claims
- 0889US5627317AAcceleration sensorBOSCH GMBH ROBERT·Filed 1995·Granted May 6, 1997·83 cites·8 claims
- 0987US6055858AAcceleration sensorBOSCH GMBH ROBERT·Filed 1999·Granted May 2, 2000·55 cites·3 claims
- 1087US5983721AMicromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereonBOSCH GMBH ROBERT·Filed 1997·Granted Nov 16, 1999·72 cites·7 claims
- 1187US5574222AAcceleration sensorBOSCH GMBH ROBERT·Filed 1995·Granted Nov 12, 1996·69 cites·6 claims
- 1286US5937275AMethod of producing acceleration sensorsBOSCH GMBH ROBERT·Filed 1996·Granted Aug 10, 1999·67 cites·12 claims
- 1386US5569852ACapacitive accelerometer sensor and method for its manufactureBOSCH GMBH ROBERT·Filed 1994·Granted Oct 29, 1996·55 cites·9 claims
- 1485US5631422ASensor comprising multilayer substrateBOSCH GMBH ROBERT·Filed 1995·Granted May 20, 1997·65 cites·10 claims
- 1585US5616523AMethod of manufacturing sensorBOSCH GMBH ROBERT·Filed 1996·Granted Apr 1, 1997·59 cites·4 claims
- 1684US6936902B2Sensor with at least one micromechanical structure and method for production thereofBOSCH GMBH ROBERT·Filed 2000·Granted Aug 30, 2005·34 cites·9 claims
- 1784US5959208AAcceleration sensorGMBH ROBERT BOSCH·Filed 1997·Granted Sep 28, 1999·52 cites·6 claims
- 1880US6117701AMethod for manufacturing a rate-of-rotation sensorBOSCH GMBH ROBERT·Filed 1997·Granted Sep 12, 2000·47 cites·14 claims
- 1978US7273764B2Sensor with at least one micromechanical structure, and method for producing itBOSCH GMBH ROBERT·Filed 2005·Granted Sep 25, 2007·6 cites·30 claims
- 2078US5542558AMethod for manufacturing micro-mechanical components using selective anodization of siliconBOSCH GMBH ROBERT·Filed 1994·Granted Aug 6, 1996·36 cites·5 claims
- 2176US5310450AMethod of making an acceleration sensorBOSCH GMBH ROBERT·Filed 1992·Granted May 10, 1994·34 cites·8 claims
- 2274US5452610AMass-flow sensorBOSCH GMBH ROBERT·Filed 1994·Granted Sep 26, 1995·35 cites·12 claims
- 2371US6187607B1Manufacturing method for micromechanical componentBOSCH GMBH ROBERT·Filed 1999·Granted Feb 13, 2001·48 cites·13 claims
- 2470US5646347ASuspension for micromechanical structure and micromechanical acceleration sensorBOSCH GMBH ROBERT·Filed 1995·Granted Jul 8, 1997·29 cites·10 claims
- 2569US6030850AMethod for manufacturing a sensorBOSCH GMBH ROBERT·Filed 1998·Granted Feb 29, 2000·24 cites·4 claims
- 2667US6140709ABonding pad structure and method for manufacturing the bonding pad structureBOSCH GMBH ROBERT·Filed 1999·Granted Oct 31, 2000·26 cites·24 claims
- 2767US6076404AMicromechanical sensor including a single-crystal silicon supportBOSCH GMBH ROBERT·Filed 1997·Granted Jun 20, 2000·21 cites·12 claims
- 2865US5461917AAcceleration sensorBOSCH GMBH ROBERT·Filed 1993·Granted Oct 31, 1995·23 cites·12 claims
- 2960US8627719B2Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor elementOFFENBERG MICHAEL·Filed 2009·Granted Jan 14, 2014·4 cites·9 claims
- 3060US6368885B1Method for manufacturing a micromechanical componentBOSCH GMBH ROBERT·Filed 2000·Granted Apr 9, 2002·15 cites·7 claims
- 3159US7259436B2Micromechanical component and corresponding production methodBOSCH GMBH ROBERT·Filed 2001·Granted Aug 21, 2007·7 cites·10 claims
- 3256US5355569AMethod of making sensorBOSCH GMBH ROBERT·Filed 1992·Granted Oct 18, 1994·16 cites·10 claims
- 3349US6251699B1Method for fabricating micromechanical componentsBOSCH GMBH ROBERT·Filed 2000·Granted Jun 26, 2001·3 cites·7 claims
- 3446US6268232B1Method for fabricating a micromechanical componentBOSCH GMBH ROBERT·Filed 1999·Granted Jul 31, 2001·12 cites·6 claims
- 3545US6558559B1Method of manufacturing micromechanical surface structures by vapor-phase etchingBOSCH GMBH ROBERT·Filed 1998·Granted May 6, 2003·10 cites·22 claims
- 3633US5467649AMass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon waferBOSCH GMBH ROBERT·Filed 1994·Granted Nov 21, 1995·4 cites·3 claims
- 3732US5792675AMethod for manufacturing an accelerometer sensor of crystalline materialBOSCH GMBH ROBERT·Filed 1996·Granted Aug 11, 1998·2 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →