Inventor · disambiguated record
Michael L. Parodi
Also filed as: PARODI MICHAEL L
3 granted patents·232 citations·filing 1995–1996
77Inventor score
Technology areasH10P
Files withSEMICONDUCTOR SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0188US5651823AClustered photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jul 29, 1997·128 cites·23 claims
- 0282US5766824AMethod and apparatus for curing photoresistSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jun 16, 1998·82 cites·16 claims
- 0355US5798140AOscillatory chuck method and apparatus for coating flat substratesSEMICONDUCTOR SYSTEMS INC·Filed 1996·Granted Aug 25, 1998·22 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →