Inventor · disambiguated record
Michael W. Pippins
Also filed as: PIPPINS MICHAEL W
4 granted patents·418 citations·filing 1995–1997
83Inventor score
Technology areasH10P
Files withBROOKS AUTOMATION INC4
Top patents by PatentIndex Score
4 records- 0193US5882413ASubstrate processing apparatus having a substrate transport with a front end extension and an internal substrate bufferBROOKS AUTOMATION INC·Filed 1997·Granted Mar 16, 1999·182 cites·45 claims
- 0286US5613821ACluster tool batchloader of substrate carrierBROOKS AUTOMATION INC·Filed 1995·Granted Mar 25, 1997·93 cites·21 claims
- 0384US5664925ABatchloader for load lockBROOKS AUTOMATION INC·Filed 1997·Granted Sep 9, 1997·83 cites·8 claims
- 0478US5607276ABatchloader for substrate carrier on load lockBROOKS AUTOMATION INC·Filed 1995·Granted Mar 4, 1997·60 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →