Inventor · disambiguated record
Mitsugu Sato
Also filed as: SATO MITSUGU
129 granted patents·6 pending applications·1,875 citations·filing 1989–2021
99Inventor score
Top patents by PatentIndex Score
135 records- 0199US6538249B1Image-formation apparatus using charged particle beams under various focus conditionsHITACHI LTD·Filed 2000·Granted Mar 25, 2003·118 cites·36 claims
- 0298US7582885B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 1, 2009·61 cites·5 claims
- 0398US6875984B2Bio electron microscope and observation method of specimenHITACHI LTD·Filed 2003·Granted Apr 5, 2005·105 cites·14 claims
- 0495US7615765B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 10, 2009·23 cites·20 claims
- 0595US7449690B2Inspection method and inspection apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 11, 2008·28 cites·20 claims
- 0695US7381968B2Charged particle beam apparatus and specimen holderHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 3, 2008·28 cites·10 claims
- 0795US7339167B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 4, 2008·29 cites·20 claims
- 0895US7075078B2Scanning electron microscopeHITACHI LTD·Filed 2005·Granted Jul 11, 2006·20 cites·12 claims
- 0995US6838667B2Method and apparatus for charged particle beam microscopyHITACHI LTD·Filed 2001·Granted Jan 4, 2005·59 cites·17 claims
- 1093US7214936B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2005·Granted May 8, 2007·15 cites·9 claims
- 1193US7109485B2Charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Sep 19, 2006·19 cites·5 claims
- 1293US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 1393US6348690B1Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 1998·Granted Feb 19, 2002·51 cites·30 claims
- 1492US7462828B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 9, 2008·18 cites·30 claims
- 1592US6787772B2Scanning electron microscopeHITACHI LTD·Filed 2001·Granted Sep 7, 2004·32 cites·15 claims
- 1692US5608218AScanning electron microscopeHITACHI LTD·Filed 1994·Granted Mar 4, 1997·69 cites·22 claims
- 1791US7928377B2Charged particle beam apparatus and sample manufacturing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 19, 2011·14 cites·13 claims
- 1891US7112792B2Defect inspection and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 26, 2006·16 cites·16 claims
- 1991US6791084B2Method and scanning electron microscope for measuring dimension of material on sampleHITACHI HIGH TECH CORP·Filed 2002·Granted Sep 14, 2004·51 cites·7 claims
- 2090US7807980B2Charged particle beam apparatus and methods for capturing images using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 5, 2010·11 cites·7 claims
- 2190US7642514B2Charged particle beam apparatusHITACHI LTD·Filed 2007·Granted Jan 5, 2010·14 cites·8 claims
- 2290US7282722B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 16, 2007·10 cites·10 claims
- 2390US6653633B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Nov 25, 2003·22 cites·7 claims
- 2489US8153969B2Inspection method and inspection system using charged particle beamFUKADA ATSUKO·Filed 2008·Granted Apr 10, 2012·16 cites·7 claims
- 2589US7442929B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 28, 2008·10 cites·20 claims
- 2689US7355177B2Electron beam deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 8, 2008·11 cites·18 claims
- 2789US7355174B2Charged particle beam emitting device and method for adjusting the optical axisHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 8, 2008·10 cites·8 claims
- 2889US7329868B2Charged particle beam apparatusHITACHI LTD·Filed 2006·Granted Feb 12, 2008·7 cites·3 claims
- 2989US6555816B1Scanning electron microscope and sample observation method using the sameHITACHI LTD·Filed 2000·Granted Apr 29, 2003·35 cites·12 claims
- 3089US5894124AScanning electron microscope and its analogous deviceHITACHI LTD·Filed 1997·Granted Apr 13, 1999·61 cites·28 claims
- 3189US4983832AScanning electron microscopeHITACHI LTD·Filed 1989·Granted Jan 8, 1991·40 cites·14 claims
- 3288US7408172B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 5, 2008·8 cites·10 claims
- 3388US6885001B2Scanning electron microscopeHITACHI LTD·Filed 2004·Granted Apr 26, 2005·20 cites·13 claims
- 3487US8629395B2Charged particle beam apparatusMORISHITA HIDEO·Filed 2011·Granted Jan 14, 2014·10 cites·17 claims
- 3587US7012252B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Mar 14, 2006·5 cites·12 claims
- 3686US9040911B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted May 26, 2015·8 cites·8 claims
- 3786US7888640B2Scanning electron microscope and method of imaging an object by using the scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 15, 2011·9 cites·8 claims
- 3886US7875849B2Electron beam apparatus and electron beam inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 25, 2011·7 cites·12 claims
- 3986US7435957B2Charged particle beam equipment and charged particle microscopyHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 14, 2008·8 cites·22 claims
- 4086US7340111B2Image evaluation method and microscopeHITACHI LTD·Filed 2005·Granted Mar 4, 2008·6 cites·5 claims
- 4186US7105816B2Electron beam deviceHITACHI HIGH TECH CORP·Filed 2004·Granted Sep 12, 2006·21 cites·5 claims
- 4286US7034296B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2001·Granted Apr 25, 2006·24 cites·17 claims
- 4385US7973282B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 5, 2011·6 cites·16 claims
- 4485US7348559B2Defect inspection and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 25, 2008·6 cites·18 claims
- 4585US7236651B2Image evaluation method and microscopeHITACHI LTD·Filed 2002·Granted Jun 26, 2007·16 cites·20 claims
- 4685US7022983B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Apr 4, 2006·15 cites·18 claims
- 4785US6627889B2Apparatus and method for observing sample using electron beamHITACHI LTD·Filed 2002·Granted Sep 30, 2003·21 cites·4 claims
- 4885US6555819B1Scanning electron microscopeHITACHI LTD·Filed 2000·Granted Apr 29, 2003·19 cites·22 claims
- 4985US6452178B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2001·Granted Sep 17, 2002·23 cites·16 claims
- 5084US7655906B2Method and apparatus for scanning and measurement by electron beamHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 2, 2010·13 cites·18 claims
Showing the top 50 of 135 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Mitsugu Sato files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →