Inventor · disambiguated record
Michael Shillinger
Also filed as: SHILLINGER MICHAEL J · SHILLINGER MICHAEL JAMES
2 granted patents·42 citations·filing 2001–2005
63Inventor score
Files withINNOVATIVE MICRO TECHNOLOGY2
Top patents by PatentIndex Score
2 records- 0190US7528691B2Dual substrate electrostatic MEMS switch with hermetic seal and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 5, 2009·32 cites·20 claims
- 0264US6593749B2Wafer level method for probing micromechanical devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Jul 15, 2003·10 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →