Inventor · disambiguated record
Mikio Takagi
Also filed as: KAMIOKA HAJIME · TAKAGI MIKIO
36 granted patents·7 pending applications·1,154 citations·filing 1974–2017
98Inventor score
Top patents by PatentIndex Score
43 records- 0198US4625678AApparatus for plasma chemical vapor depositionFUJITSU LTD·Filed 1985·Granted Dec 2, 1986·272 cites·6 claims
- 0297US4539068AVapor phase growth methodFUJITSU LTD·Filed 1982·Granted Sep 3, 1985·147 cites·3 claims
- 0390US4394401AMethod of plasma enhanced chemical vapor deposition of phosphosilicate glass filmFUJITSU LTD·Filed 1981·Granted Jul 19, 1983·77 cites·10 claims
- 0489US7691546B2Photomask blank and photomaskSHINETSU CHEMICAL CO·Filed 2005·Granted Apr 6, 2010·10 cites·8 claims
- 0586US7618753B2Photomask blank, photomask and method for producing thoseSHINETSU CHEMICAL CO·Filed 2005·Granted Nov 17, 2009·8 cites·20 claims
- 0684US4581622AUV erasable EPROM with UV transparent silicon oxynitride coatingFUJITSU LTD·Filed 1984·Granted Apr 8, 1986·50 cites·8 claims
- 0782US6869500B2Method for processing a wafer and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Mar 22, 2005·35 cites·36 claims
- 0881US5972116AMethod and apparatus for producing a semiconductor deviceF T I CO LTD·Filed 1995·Granted Oct 26, 1999·64 cites·27 claims
- 0980US4532022AProcess of producing a semiconductor deviceFUJITSU LTD·Filed 1983·Granted Jul 30, 1985·41 cites·10 claims
- 1080US3940288AMethod of making a semiconductor deviceFUJITSU LTD·Filed 1974·Granted Feb 24, 1976·30 cites·19 claims
- 1179US6204194B1Method and apparatus for producing a semiconductor deviceF T L CO LTD·Filed 1999·Granted Mar 20, 2001·58 cites·14 claims
- 1277US8007964B2Photomask blank and photomaskSHINETSU CHEMICAL CO·Filed 2010·Granted Aug 30, 2011·2 cites·17 claims
- 1377US5387557AMethod for manufacturing semiconductor devices using heat-treatment vertical reactor with temperature zonesF T L CO LTD·Filed 1992·Granted Feb 7, 1995·58 cites·16 claims
- 1474US6793734B2Heating furnace and semiconductor wafer-holding jig assembly and process of manufacturing semiconductor devicesF T L CO LTD·Filed 2002·Granted Sep 21, 2004·15 cites·4 claims
- 1572US7556892B2Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer methodSHINETSU CHEMICAL CO·Filed 2005·Granted Jul 7, 2009·3 cites·28 claims
- 1669US5407485AApparatus for producing semiconductor device and method for producing semiconductor deviceF T L CO LTD·Filed 1994·Granted Apr 18, 1995·40 cites·9 claims
- 1768US4293590AProcess for high pressure oxidation of siliconFUJITSU LTD·Filed 1980·Granted Oct 6, 1981·23 cites·7 claims
- 1866US5445676AMethod and apparatus for manufacturing semiconductor devicesF T L CO LTD·Filed 1994·Granted Aug 29, 1995·34 cites·22 claims
- 1965US6867147B2Method of surface treatment of semiconductorF T L CO LTD·Filed 2001·Granted Mar 15, 2005·10 cites·9 claims
- 2062US4275094AProcess for high pressure oxidation of siliconFUJITSU LTD·Filed 1978·Granted Jun 23, 1981·14 cites·14 claims
- 2160US6248672B1Method of producing a semiconductor device in a heating furnace having a reaction tube with a temperature-equalizing zoneF T L CO LTD·Filed 1999·Granted Jun 19, 2001·22 cites·2 claims
- 2259US8097541B2Method for surface treating semiconductorTAKAGI MIKIO·Filed 2006·Granted Jan 17, 2012·2 cites·1 claims
- 2358US7700916B2Logical CAD navigation for device characteristics evaluation systemHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 20, 2010·2 cites·19 claims
- 2457US6077573APlasma enhanced chemical vapor deposition methods of forming hemispherical grained silicon layersSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jun 20, 2000·18 cites·30 claims
- 2557US4503315ASemiconductor device with fuseFUJITSU LTD·Filed 1982·Granted Mar 5, 1985·19 cites·10 claims
- 2657US4263087AProcess for producing epitaxial layersFUJITSU LTD·Filed 1980·Granted Apr 21, 1981·22 cites·9 claims
- 2756US6159873AMethod for producing semiconductor device and production apparatus of semiconductor deviceF T L CO LTD·Filed 1996·Granted Dec 12, 2000·19 cites·2 claims
- 2853US6686259B2Method for manufacturing solid state image pick-up deviceSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Feb 3, 2004·5 cites·19 claims
- 2951US2019311644A1Computer system and program for assisting grading of examination papersNICHINOKEN INC·Filed 2017·Application pending·0 cites
- 3051US2009283216A1Method of and apparatus for manufacturing semiconductor deviceTAKAGI MIKIO·Filed 2009·Application pending·0 cites
- 3148US4513026AMethod for coating a semiconductor device with a phosphosilicate glassFUJITSU LTD·Filed 1983·Granted Apr 23, 1985·15 cites·9 claims
- 3247US4293589AProcess for high pressure oxidation of siliconFUJITSU LTD·Filed 1980·Granted Oct 6, 1981·10 cites·16 claims
- 3345US2012202352A1Method of and apparatus for manufacturing semiconductor deviceTAKAGI MIKIO·Filed 2012·Application pending·0 cites
- 3443US8178837B2Logical CAD navigation for device characteristics evaluation systemANDO TOHRU·Filed 2010·Granted May 15, 2012·0 cites·8 claims
- 3542US4412388AMethod for drying semiconductor substratesFUJITSU LTD·Filed 1980·Granted Nov 1, 1983·10 cites·11 claims
- 3642US2005130451A1Method for processing a wafer and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 3742US2004175878A1Heating furnace and semiconductor wafer-holding jig assembly and process of manufacturing semiconductor devicesFiled 2004·Application pending·0 cites
- 3841US2010184297A1Method for protecting semiconductor wafer and process for producing semiconductor deviceTAKAGI MIKIO·Filed 2008·Application pending·0 cites
- 3941US2003186517A1Method of and apparatus for manufacturing semiconductor deviceFiled 2003·Application pending·0 cites
- 4040US5643839AMethod for producing semiconductor deviceF T L CO LTD·Filed 1995·Granted Jul 1, 1997·7 cites·1 claims
- 4135US4487787AMethod of growing silicate glass layers employing chemical vapor deposition processFUJITSU LTD·Filed 1982·Granted Dec 11, 1984·6 cites·8 claims
- 4232US4210473AProcess for producing a semiconductor deviceFUJITSU LTD·Filed 1978·Granted Jul 1, 1980·4 cites·26 claims
- 4327US5209847AUltrathin membrane of polymethacrylate or polycrotonate and device provided with ultrathin membraneNIPPON OILS & FATS CO LTD·Filed 1990·Granted May 11, 1993·2 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →