Inventor · disambiguated record
Mitsukazu Takahashi
Also filed as: TAKAHASHI MITSUKAZU
13 granted patents·1 pending application·713 citations·filing 1991–2020
91Inventor score
Top patents by PatentIndex Score
14 records- 0196US5315092AApparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatusDAINIPPON SCREEN MFG·Filed 1991·Granted May 24, 1994·609 cites·22 claims
- 0281US6518547B2Heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2001·Granted Feb 11, 2003·30 cites·4 claims
- 0379US10910247B2Substrate container, load port apparatus, and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Feb 2, 2021·3 cites·5 claims
- 0479US9576831B2Substrate container, a load port apparatus, and a substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Feb 21, 2017·3 cites·16 claims
- 0578US7371997B2Thermal processing apparatus and thermal processing methodDAINIPPON SCREEN MFG·Filed 2005·Granted May 13, 2008·7 cites·12 claims
- 0670US9327918B2Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrateDAINIPPON SCREEN MFG·Filed 2013·Granted May 3, 2016·3 cites·7 claims
- 0770US6868302B2Thermal processing apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Mar 15, 2005·11 cites·16 claims
- 0868US5539855AApparatus for measuring the temperature of a substrateDAINIPPON SCREEN MFG·Filed 1994·Granted Jul 23, 1996·33 cites·17 claims
- 0963US9601357B2Substrate processing device and substrate processing methodHASHIMOTO KOJI·Filed 2012·Granted Mar 21, 2017·1 cites·20 claims
- 1063US7038173B2Thermal processing apparatus and thermal processing methodDAINIPPON SCREEN MFG·Filed 2003·Granted May 2, 2006·13 cites·36 claims
- 1152US10964556B2Substrate processing apparatus, substrate processing system, and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Mar 30, 2021·0 cites·8 claims
- 1248US12080566B2Substrate treating apparatus and substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Sep 3, 2024·0 cites·14 claims
- 1346US2016240401A1Substrate processing apparatus, substrate processing system, and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
- 1436US10381249B2Substrate container, load port apparatus, and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Aug 13, 2019·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →