Inventor · disambiguated record
Michihiko Tomita
Also filed as: TOMITA MICHIHIKO
1 granted patent·1 pending application·0 citations·filing 2020–2022
3Inventor score
Technology areasH10P
Files withSUMCO CORP2
Top patents by PatentIndex Score
2 records- 0143US2024258126A1Semiconductor wafer cleaning device, semiconductor wafer cleaning method, and method for manufacturing silicon waferSUMCO CORP·Filed 2022·Application pending·0 cites
- 0236US12205830B2Cleaning apparatus for semiconductor wafer and method of cleaning semiconductor waferSUMCO CORP·Filed 2020·Granted Jan 21, 2025·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →