Inventor · disambiguated record
Ming-Hsun Tsai
Also filed as: TSAI MING-HSUN
35 granted patents·13 pending applications·41 citations·filing 2005–2025
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD39TSAI MING-HSUN4DEXIN CORP2POWERCHIP SEMICONDUCTOR MFG CORP2NAT SYNCHROTRON RADIATION RES CT1
Top patents by PatentIndex Score
48 records- 0197US11275317B1Droplet generator and method of servicing a photolithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 15, 2022·3 cites·20 claims
- 0296US11029613B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 8, 2021·3 cites·20 claims
- 0395US12055864B2Droplet generator and method of servicing a photolithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 6, 2024·2 cites·20 claims
- 0494US11553581B2Radiation source apparatus and method for using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 10, 2023·2 cites·20 claims
- 0594US11392041B2Particle removal device and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 19, 2022·2 cites·20 claims
- 0694US10875060B2Method and apparatus for removing debris from collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·8 cites·20 claims
- 0794US10719020B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 21, 2020·4 cites·20 claims
- 0893US11809083B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0993US11533799B1System and method for supplying target material in an EUV light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 20, 2022·2 cites·20 claims
- 1092US10495974B2Target feeding systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 3, 2019·5 cites·20 claims
- 1189US2025362616A1Inspection tool for a semiconductor processing tool and methods of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1287US12066761B2Inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 20, 2024·1 cites·20 claims
- 1387US2025362615A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1486US12405541B2Methods of servicing photolithographic apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 2, 2025·0 cites·20 claims
- 1586US11602037B1Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 7, 2023·1 cites·20 claims
- 1686US11528797B2Method and system for generating droplets for EUV photolithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 13, 2022·1 cites·20 claims
- 1786US2025321503A1Extreme ultraviolet lithography toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1881US2024361701A1Novel design of an inspection tool for an extreme ultraviolet radiation source to observe tin residualTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1979US10514167B1Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 24, 2019·1 cites·20 claims
- 2077US12158701B2Particle removal device and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 2175US10779387B2Extreme ultraviolet photolithography system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 2275US2024365460A1Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2375US2024365461A1Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2474US12235586B2EUV photolithography system fuel source and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 2574US12124644B2Mouse pad deviceDEXIN CORP·Filed 2024·Granted Oct 22, 2024·0 cites·3 claims
- 2674US12114411B2Apparatus and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 2773US12096543B2Method for using radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 2872US12167526B2Method and system for generating droplets for EUV photolithography processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·20 claims
- 2972US11644759B2Droplet generator and method of servicing extreme ultraviolet radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 9, 2023·0 cites·20 claims
- 3072US2025300024A1Wafer structurePOWERCHIP SEMICONDUCTOR MFG CORP·Filed 2025·Application pending·0 cites
- 3172US2022404716A1Inspection tool for a semiconductor processing tool and methods of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3268US12063734B2Droplet generator assembly and method of replacing componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 13, 2024·0 cites·20 claims
- 3366US2025189898A1Method and apparatus for monitoring an extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3465US12354921B2Wafer structure including probe marked test padsPOWERCHIP SEMICONDUCTOR MFG CORP·Filed 2022·Granted Jul 8, 2025·0 cites·6 claims
- 3565US11921941B2Mouse pad deviceDEXIN CORP·Filed 2021·Granted Mar 5, 2024·0 cites·5 claims
- 3665US11537053B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 27, 2022·0 cites·20 claims
- 3765US11153958B2Extreme ultraviolet photolithography methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 19, 2021·0 cites·20 claims
- 3863US10684009B2Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 16, 2020·0 cites·20 claims
- 3960US11653438B2Droplet collecting system and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 16, 2023·0 cites·20 claims
- 4060US7598943B2Resizable wireless pointing device with a storable receiverTSAI MING-HSUN·Filed 2005·Granted Oct 6, 2009·3 cites·12 claims
- 4157US11134558B2Droplet generator assembly and method for using the same and radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 4255US11576250B1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 7, 2023·0 cites·20 claims
- 4354US11442365B1EUV photolithography system and methods of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 13, 2022·0 cites·20 claims
- 4444US2023345610A1Method and apparatus for monitoring an extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4540US9360126B2Relief valve assembly with anti-frozen shielding hatNAT SYNCHROTRON RADIATION RES CT·Filed 2014·Granted Jun 7, 2016·0 cites·17 claims
- 4638US2019218823A1Combination lockTSAI MING HSUN·Filed 2019·Application pending·0 cites
- 4737US2006158431A1Pointing device with multidirectional window viewing functionTSAI MING-HSUN·Filed 2005·Application pending·0 cites
- 4834US2018066455A1Combination LockTSAI MING HSUN·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →