Inventor · disambiguated record
Michael S. Wilhoit
Also filed as: WILHOIT MICHAEL S
3 granted patents·428 citations·filing 1994–1996
77Inventor score
Technology areasH10P
Files withMICRON TECHNOLOGY INC3
Top patents by PatentIndex Score
3 records- 0194US5846375AArea specific temperature control for electrode plates and chucks used in semiconductor processing equipmentMICRON TECHNOLOGY INC·Filed 1996·Granted Dec 8, 1998·401 cites·17 claims
- 0247US5395781AMethod of making a semiconductor device using photoresist flowMICRON TECHNOLOGY INC·Filed 1994·Granted Mar 7, 1995·17 cites·18 claims
- 0341US5656523APhotoresist flow during the formation of a semiconductor deviceMICRON TECHNOLOGY INC·Filed 1995·Granted Aug 12, 1997·10 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →