Inventor · disambiguated record

Mi-Kyung Woo

Also filed as: WOO MI-KYUNG

2 granted patents·5 pending applications·1 citations·filing 2021–2024

31Inventor score

Technology areasG03F

Files withS&S TECH CO LTD7

Top patents by PatentIndex Score

7 records

0184US11940725B2Phase shift blankmask and photomask for EUV lithographyS&S TECH CO LTD·Filed 2021·Granted Mar 26, 2024·1 cites·34 claims
0262US2025231473A1Reverse photomask that phase shift film pattern is used for reflective pattern, and blankmask for manufacturing the sameS&S TECH CO LTD·Filed 2024·Application pending·0 cites
0361US11927880B2Phase shift blankmask and photomask for EUV lithographyS&S TECH CO LTD·Filed 2022·Granted Mar 12, 2024·0 cites·38 claims
0461US2025123551A1PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY WITH ABSORBING FILM OF CrSbS&S TECH CO LTD·Filed 2024·Application pending·0 cites
0558US2024329516A1Phase shift blankmask and photomask for euv lithographyS&S TECH CO LTD·Filed 2023·Application pending·0 cites
0657US2024329515A1Blankmask for euv lithography with absorbing film, and photomask fabricated with the sameS&S TECH CO LTD·Filed 2023·Application pending·0 cites
0755US2024126163A1Phase shift blankmask and photomask for euv lithographyS&S TECH CO LTD·Filed 2023·Application pending·0 cites

Join the waitlist — get patent alerts

Get an alert when Mi-Kyung Woo files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →