Inventor · disambiguated record
Ming-Shuo Yen
Also filed as: YEN MING-SHUO
10 granted patents·2 pending applications·107 citations·filing 1997–2006
88Inventor score
Top patents by PatentIndex Score
12 records- 0169US5930664AProcess for preventing corrosion of aluminum bonding pads after passivation/ARC layer etchingTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 27, 1999·41 cites·20 claims
- 0268US6623995B1Optimized monitor method for a metal patterning processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Sep 23, 2003·14 cites·20 claims
- 0366US7445159B2Dual trench alternating phase shift mask fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Nov 4, 2008·3 cites·20 claims
- 0457US7033947B2Dual trench alternating phase shift mask fabricationTAIWAN SEMINCONDUCTOR MFG CO L·Filed 2003·Granted Apr 25, 2006·5 cites·13 claims
- 0555US5962345AMethod to reduce contact resistance by means of in-situ ICPTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Oct 5, 1999·22 cites·18 claims
- 0648US6267121B1Process to season and determine condition of a high density plasma etcherTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 31, 2001·14 cites·19 claims
- 0740US6680474B2Semiconductor calibration wafer with no charge effectTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 20, 2004·2 cites·20 claims
- 0836US6930323B2Test keys structure for a control monitor waferTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 16, 2005·0 cites·10 claims
- 0935US6642150B1Method for testing for blind hole formed in wafer layerTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Nov 4, 2003·6 cites·1 claims
- 1035US2006063388A1Method for using a water vapor treatment to reduce surface charge after metal etchingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 1129US2005198847A1Parallel rulerFiled 2004·Application pending·0 cites
- 1228US6734511B2Auto sensor function chipTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted May 11, 2004·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →