Inventor · disambiguated record
Minoru Yoshii
Also filed as: YOSHII MINORU
55 granted patents·4 pending applications·2,569 citations·filing 1983–2013
99Inventor score
Top patents by PatentIndex Score
59 records- 0199US5610715ADisplacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection headCANON KK·Filed 1995·Granted Mar 11, 1997·397 cites·7 claims
- 0297US5486919AInspection method and apparatus for inspecting a particle, if any, on a substrate having a patternCANON KK·Filed 1993·Granted Jan 23, 1996·155 cites·28 claims
- 0396US7508493B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Mar 24, 2009·30 cites·10 claims
- 0495US5340992AApparatus and method of detecting positional relationship using a weighted coefficientCANON KK·Filed 1992·Granted Aug 23, 1994·110 cites·24 claims
- 0594US5327221ADevice for detecting positional relationship between two objectsCANON KK·Filed 1992·Granted Jul 5, 1994·99 cites·15 claims
- 0694US4804831AFocus detecting apparatus independent of object image contrastCANON KK·Filed 1986·Granted Feb 14, 1989·114 cites·56 claims
- 0794US4780739AAnti-vibration imaging deviceCANON KK·Filed 1986·Granted Oct 25, 1988·105 cites·20 claims
- 0891US5767962AInspection system and device manufacturing method using the sameCANON KK·Filed 1996·Granted Jun 16, 1998·102 cites·7 claims
- 0990US5729290AMovement detection device and focus detection apparatus using such deviceCANON KK·Filed 1995·Granted Mar 17, 1998·87 cites·9 claims
- 1090US5333050AMeasuring method and apparatus for meausring the positional relationship of first and second gratingsCANON KK·Filed 1991·Granted Jul 26, 1994·71 cites·16 claims
- 1188US6040909ASurface position detecting system and device manufacturing method using the sameCANON KK·Filed 1998·Granted Mar 21, 2000·68 cites·42 claims
- 1288US4788596AImage stabilizing deviceCANON KK·Filed 1986·Granted Nov 29, 1988·57 cites·6 claims
- 1387US6636311B1Alignment method and exposure apparatus using the sameCANON KK·Filed 1999·Granted Oct 21, 2003·63 cites·5 claims
- 1487US5721721ATwo scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording mediumCANON KK·Filed 1996·Granted Feb 24, 1998·120 cites·17 claims
- 1586US5369486APosition detector for detecting the position of an object using a diffraction grating positioned at an angleCANON KK·Filed 1992·Granted Nov 29, 1994·51 cites·7 claims
- 1684US5519686AEncoder for controlling measurements in the range of a few angstromsCANON KK·Filed 1995·Granted May 21, 1996·69 cites·34 claims
- 1782US5610718AApparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizesCANON KK·Filed 1994·Granted Mar 11, 1997·40 cites·9 claims
- 1881US5969820ASurface position detecting system and exposure apparatus using the sameCANON KK·Filed 1997·Granted Oct 19, 1999·47 cites·3 claims
- 1981US5432603AOptical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detectedCANON KK·Filed 1993·Granted Jul 11, 1995·36 cites·13 claims
- 2080US5461474AInspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 1994·Granted Oct 24, 1995·49 cites·26 claims
- 2180US5396336AIn-focus detecting deviceCANON KK·Filed 1989·Granted Mar 7, 1995·36 cites·49 claims
- 2277US5834767ASurface position detecting system and projection exposure apparatus using the sameCANON KK·Filed 1997·Granted Nov 10, 1998·39 cites·12 claims
- 2377US5200800APosition detecting method and apparatusCANON KK·Filed 1992·Granted Apr 6, 1993·30 cites·21 claims
- 2476US5652657AInspection system for original with pellicleCANON KK·Filed 1995·Granted Jul 29, 1997·44 cites·6 claims
- 2576US4641962AAberration measuring methodCANON KK·Filed 1983·Granted Feb 10, 1987·26 cites·11 claims
- 2675US6972847B2Position detecting system and exposure apparatus using the sameCANON KK·Filed 2005·Granted Dec 6, 2005·3 cites·1 claims
- 2775US5777744AExposure state detecting system and exposure apparatus using the sameCANON KK·Filed 1996·Granted Jul 7, 1998·46 cites·24 claims
- 2875US5751426APositional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same objectCANON KK·Filed 1995·Granted May 12, 1998·37 cites·14 claims
- 2973US6594012B2Exposure apparatusCANON KK·Filed 1997·Granted Jul 15, 2003·32 cites·49 claims
- 3073US5861952AOptical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection positionCANON KK·Filed 1992·Granted Jan 19, 1999·37 cites·8 claims
- 3171US5000572ADistance measuring systemCANON KK·Filed 1990·Granted Mar 19, 1991·27 cites·18 claims
- 3270US5750294ABest focus determining methodCANON KK·Filed 1996·Granted May 12, 1998·30 cites·8 claims
- 3370US5122660ADistance measuring system utilizing an object with at least one inclined surfaceCANON KK·Filed 1991·Granted Jun 16, 1992·19 cites·35 claims
- 3467US5321502AMeasuring method and measuring apparatusCANON KK·Filed 1992·Granted Jun 14, 1994·25 cites·9 claims
- 3565US6124601APosition sensor having a reflective projecting system and device fabrication method using the sensorCANON KK·Filed 1996·Granted Sep 26, 2000·24 cites·16 claims
- 3665US5526044AMovement detection device and focus detection apparatus using such deviceCANON KK·Filed 1993·Granted Jun 11, 1996·20 cites·24 claims
- 3764US7030998B2Phase measurement apparatus for measuring characterization of optical thin filmsCANON KK·Filed 2003·Granted Apr 18, 2006·8 cites·3 claims
- 3863US5325176APosition detecting method and apparatus including Fraunhofer diffraction detectorCANON KK·Filed 1992·Granted Jun 28, 1994·17 cites·40 claims
- 3962US5541729AMeasuring apparatus utilizing diffraction of reflected and transmitted lightCANON KK·Filed 1993·Granted Jul 30, 1996·21 cites·10 claims
- 4062US5343291AMethod and apparatus for measuring an interval between two objectsCANON KK·Filed 1992·Granted Aug 30, 1994·16 cites·34 claims
- 4162US5291023APosition detecting system utilizing a weight coefficient to determine a gravity center of lightCANON KK·Filed 1993·Granted Mar 1, 1994·16 cites·6 claims
- 4261US6906805B1Position detecting system and exposure apparatus using the sameCANON KK·Filed 1999·Granted Jun 14, 2005·16 cites·11 claims
- 4361US4842408APhase shift measuring apparatus utilizing optical meterodyne techniquesCANON KK·Filed 1987·Granted Jun 27, 1989·21 cites·9 claims
- 4459US5319444APosition detecting method and apparatusCANON KK·Filed 1993·Granted Jun 7, 1994·14 cites·115 claims
- 4558US5192998AIn-focus detecting deviceCANON KK·Filed 1992·Granted Mar 9, 1993·16 cites·24 claims
- 4657US5055665AFocus detecting apparatus jointly employing outputs of plural diverse detectorsCANON KK·Filed 1990·Granted Oct 8, 1991·17 cites·38 claims
- 4752US5523844ADisplacement detection apparatusCANON KK·Filed 1993·Granted Jun 4, 1996·15 cites·18 claims
- 4850US5742386AApparatus for detecting foreign matter on a substrate, and an exposure apparatus including the sameCANON KK·Filed 1997·Granted Apr 21, 1998·14 cites·10 claims
- 4949US5404220AMeasuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beamsCANON KK·Filed 1992·Granted Apr 4, 1995·11 cites·14 claims
- 5045US9052179B2Optical coherence tomography apparatus and methodCANON KK·Filed 2012·Granted Jun 9, 2015·0 cites·9 claims
Showing the top 50 of 59 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →