Inventor · disambiguated record
Morimitsu Tanaka
Also filed as: TANAKA MORIMITSU
4 granted patents·96 citations·filing 1997–2003
79Inventor score
Top patents by PatentIndex Score
4 records- 0175US6093080APolishing apparatus and methodNEC CORP·Filed 1999·Granted Jul 25, 2000·44 cites·13 claims
- 0261US6116993AChemicomechanical polishing device for a semiconductor waferNEC CORP·Filed 1997·Granted Sep 12, 2000·29 cites·6 claims
- 0355US6231425B1Polishing apparatus and methodNEC CORP·Filed 1999·Granted May 15, 2001·19 cites·14 claims
- 0451US7064079B2Method of removing polymer and apparatus for doing the sameNEC ELECTRONICS CORP·Filed 2003·Granted Jun 20, 2006·4 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →