Inventor · disambiguated record
Motonari Tateno
Also filed as: TATENO MOTONARI
3 granted patents·6 citations·filing 2001–2005
58Inventor score
Technology areasG01N
Files withNEC CORP3
Top patents by PatentIndex Score
3 records- 0171US7423745B2Optical inspection apparatus and optical inspection methodNEC CORP·Filed 2005·Granted Sep 9, 2008·5 cites·28 claims
- 0248US6538795B2Optical reticle substrate inspection apparatus and beam scanning method of the sameNEC CORP·Filed 2001·Granted Mar 25, 2003·1 cites·8 claims
- 0342US6665112B2Optical reticle substrate inspection apparatus and beam scanning method of the sameNEC CORP·Filed 2003·Granted Dec 16, 2003·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →