Inventor · disambiguated record

Munetaka Koda

Also filed as: KODA MUNETAKA

3 granted patents·186 citations·filing 1992–1995

77Inventor score

Technology areasH10P

Files withKAWASAKI STEEL CO3

Top patents by PatentIndex Score

3 records

0181US5563093AMethod of manufacturing fet semiconductor devices with polysilicon gate having large grain sizesKAWASAKI STEEL CO·Filed 1995·Granted Oct 8, 1996·81 cites·10 claims
0281US5326406AMethod of cleaning semiconductor substrate and apparatus for carrying out the sameKAWASAKI STEEL CO·Filed 1992·Granted Jul 5, 1994·91 cites·26 claims
0340US5466641AProcess for forming polycrystalline silicon filmKAWASAKI STEEL CO·Filed 1993·Granted Nov 14, 1995·14 cites·23 claims

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