Inventor · disambiguated record
Mu-Sen Lu
Also filed as: Lu mu-sen
2 granted patents·1 pending application·2 citations·filing 2015–2015
34Inventor score
Technology areasH10P
Files withLINCO TECH CO LTD3
Top patents by PatentIndex Score
3 records- 0160US9771649B2Substrate carrier unit for a film deposition apparatusLINCO TECH CO LTD·Filed 2015·Granted Sep 26, 2017·2 cites·10 claims
- 0224US2017016110A1Double-valve device for a film deposition apparatusLINCO TECH CO LTD·Filed 2015·Application pending·0 cites
- 0320US9611542B2Film deposition system having a substrate carrier and a cooling deviceLINCO TECH CO LTD·Filed 2015·Granted Apr 4, 2017·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →