Inventor · disambiguated record
Naokatsu Ikegami
Also filed as: IKEGAMI NAOKATSU
14 granted patents·3 pending applications·195 citations·filing 1998–2007
92Inventor score
Top patents by PatentIndex Score
17 records- 0191US7622394B2Method of fabricating semiconductor device including forming a protective layer and removing after etching a trenchOKI SEMICONDUCTOR CO LTD·Filed 2006·Granted Nov 24, 2009·21 cites·15 claims
- 0286US7153716B2Method of manufacturing a micro-electrical-mechanical systemOKI ELECTRIC IND CO LTD·Filed 2005·Granted Dec 26, 2006·14 cites·18 claims
- 0382US6355572B1Method of dry etching organic SOG filmOKI ELECTRIC IND CO LTD·Filed 2000·Granted Mar 12, 2002·22 cites·2 claims
- 0478US7100448B2AccelerometerOKI ELECTRIC IND CO LTD·Filed 2004·Granted Sep 5, 2006·20 cites·9 claims
- 0577US6413438B1Method of forming via hole by dry etchingOKI ELECTRIC IND CO LTD·Filed 2000·Granted Jul 2, 2002·21 cites·3 claims
- 0674US6037588AMethod for testing semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 1998·Granted Mar 14, 2000·46 cites·20 claims
- 0765US6500745B1Method for manufacturing sidewall spacers of a semiconductor device with high etch selectivity and minimized shavingOKI ELECTRIC IND CO LTD·Filed 2001·Granted Dec 31, 2002·10 cites·22 claims
- 0861US6200735B1Method for forming contact hole by dry etchingOKI ELECTRIC IND CO LTD·Filed 1998·Granted Mar 13, 2001·26 cites·5 claims
- 0957US7004030B2Acceleration sensorOKI ELECTRIC IND CO LTD·Filed 2003·Granted Feb 28, 2006·9 cites·4 claims
- 1056US7509858B2Acceleration sensor manufacturable by simplified methodOKI SEMICONDUCTOR CO LTD·Filed 2005·Granted Mar 31, 2009·2 cites·29 claims
- 1152US6624010B2Method of manufacturing semiconductor device having thin film SOI structureOKI ELECTRIC IND CO LTD·Filed 2002·Granted Sep 23, 2003·4 cites·16 claims
- 1241US2004092111A1Method of dry etching organic SOG filmFiled 2003·Application pending·0 cites
- 1340US7323354B2Method of manufacturing MEMS deviceOKI ELECTRIC IND CO LTD·Filed 2004·Granted Jan 29, 2008·0 cites·7 claims
- 1440US7029957B2Method of manufacturing semiconductor device having thin film SOI structureOKI ELECTRIC IND CO LTD·Filed 2003·Granted Apr 18, 2006·0 cites·12 claims
- 1540US2007215966A1Piezoresistance element and semiconductor device having the sameOKI ELECTRIC IND CO LTD·Filed 2007·Application pending·0 cites
- 1639US2002094695A1Method of dry etching organic SOG filmFiled 2001·Application pending·0 cites
- 1735US7084069B2Method for manufacturing a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2001·Granted Aug 1, 2006·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →