Inventor · disambiguated record
Narayana V. Sarma
Also filed as: SARMA NARAYANA V
6 granted patents·1,016 citations·filing 1994–1995
88Inventor score
Technology areasC23C
Files withIBM6
Top patents by PatentIndex Score
6 records- 0198US5431734AAluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical controlIBM·Filed 1994·Granted Jul 11, 1995·431 cites·4 claims
- 0297US5665608AMethod of aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical controlIBM·Filed 1995·Granted Sep 9, 1997·478 cites·4 claims
- 0373US5614247AApparatus for chemical vapor deposition of aluminum oxideIBM·Filed 1994·Granted Mar 25, 1997·32 cites·5 claims
- 0470US5728222AApparatus for chemical vapor deposition of aluminum oxideIBM·Filed 1995·Granted Mar 17, 1998·33 cites·10 claims
- 0569US5648113AAluminum oxide LPCVD systemIBM·Filed 1994·Granted Jul 15, 1997·25 cites·12 claims
- 0656US5540777AAluminum oxide LPCVD systemIBM·Filed 1995·Granted Jul 30, 1996·17 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →