Inventor · disambiguated record
Nadyeh Shariloo
Also filed as: SHARILOO NADYEH
0 granted patents·2 pending applications·0 citations·filing 2005–2006
Files withZEISS CARL SMT AG2
Top patents by PatentIndex Score
2 records- 0142US2007143032A1Apparatus and method for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional bodyZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 0233US2007285643A1Method For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatus And Methods For Operating Optical Elements And Euv-Lithography Apparatus, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The MethodsZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
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