Inventor · disambiguated record
Neil K. Colvin
Also filed as: COLVIN NEIL · COLVIN NEIL K
35 granted patents·10 pending applications·69 citations·filing 2006–2025
95Inventor score
Top patents by PatentIndex Score
45 records- 0197US11170967B2Liquid metal ion sourceAXCELIS TECH INC·Filed 2020·Granted Nov 9, 2021·9 cites·20 claims
- 0291US10074508B2Low conductance self-shielding insulator for ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted Sep 11, 2018·6 cites·20 claims
- 0387US9543110B2Reduced trace metals contamination ion source for an ion implantation systemAXCELIS TECH INC·Filed 2013·Granted Jan 10, 2017·8 cites·9 claims
- 0486US11699565B2Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamAXCELIS TECH INC·Filed 2021·Granted Jul 11, 2023·1 cites·20 claims
- 0585US10087520B2Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Oct 2, 2018·5 cites·20 claims
- 0685US8604418B2In-vacuum beam defining aperture cleaning for particle reductionCOLVIN NEIL K·Filed 2010·Granted Dec 10, 2013·8 cites·20 claims
- 0784US9006690B2Extraction electrode assembly voltage modulation in an ion implantation systemCOLVIN NEIL K·Filed 2013·Granted Apr 14, 2015·7 cites·5 claims
- 0882US10676370B2Hydrogen co-gas when using aluminum iodide as an ion source materialAXCELIS TECH INC·Filed 2018·Granted Jun 9, 2020·2 cites·16 claims
- 0981US10170286B2In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion sourceAXCELIS TECH INC·Filed 2016·Granted Jan 1, 2019·3 cites·12 claims
- 1081US7655930B2Ion source arc chamber sealAXCELIS TECH INC·Filed 2007·Granted Feb 2, 2010·8 cites·14 claims
- 1179US12497687B2Ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or moleculesAXCELIS TECH INC·Filed 2023·Granted Dec 16, 2025·0 cites·16 claims
- 1278US12154763B2Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2023·Granted Nov 26, 2024·0 cites·19 claims
- 1378US12051561B2Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamAXCELIS TECH INC·Filed 2023·Granted Jul 30, 2024·0 cites·20 claims
- 1477US9870893B2Multi-piece electrode apertureAXCELIS TECH INC·Filed 2017·Granted Jan 16, 2018·2 cites·18 claims
- 1575US10679818B2Low conductance self-shielding insulator for ion implantation systemsAXCELIS TECH INC·Filed 2018·Granted Jun 9, 2020·1 cites·20 claims
- 1675US8779395B2Automatic control system for selection and optimization of co-gas flow levelsCOLVIN NEIL K·Filed 2011·Granted Jul 15, 2014·3 cites·20 claims
- 1774US12476085B2Shielded gas inlet for an ion sourceAXCELIS TECH INC·Filed 2022·Granted Nov 18, 2025·0 cites·29 claims
- 1873US11062873B2Hydrogen bleed gas for an ion source housingAXCELIS TECH INC·Filed 2019·Granted Jul 13, 2021·1 cites·19 claims
- 1972US10847339B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2019·Granted Nov 24, 2020·1 cites·20 claims
- 2071US11728140B1Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2022·Granted Aug 15, 2023·0 cites·20 claims
- 2170US7683348B2Sensor for ion implanterAXCELIS TECH INC·Filed 2006·Granted Mar 23, 2010·3 cites·20 claims
- 2269US2025207239A1Liquid metal alloy feed materials for ion implantationAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 2367US10361069B2Ion source repeller shield comprising a labyrinth sealAXCELIS TECH INC·Filed 2017·Granted Jul 23, 2019·1 cites·20 claims
- 2465US11276543B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 2565US2025253125A1System and method for managing solid phase precursors for an ion implantation systemAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 2663US12463003B2High temperature ion sourceAXCELIS TECH INC·Filed 2025·Granted Nov 4, 2025·0 cites·16 claims
- 2763US2025277303A1Low-temperature vaporizer for ion implanter with in-vacuum controlled flowAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 2863US2025188592A1High-efficiency target for an ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 2963US2025118524A1Actively heated target to generate an ion beamAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 3060US10535498B2Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2018·Granted Jan 14, 2020·0 cites·14 claims
- 3158US11699563B2Etching aluminum nitride or aluminum oxide to generate an aluminum ion beamAXCELIS TECH INC·Filed 2021·Granted Jul 11, 2023·0 cites·14 claims
- 3255US11521821B2Ion source repellerAXCELIS TECH INC·Filed 2021·Granted Dec 6, 2022·0 cites·22 claims
- 3354US2024145213A1Wire or rod shaped extraction electrode opticsAXCELIS TECH INC·Filed 2022·Application pending·0 cites
- 3452US10256069B2Phosphorous trifluoride co-gas for carbon implantsAXCELIS TECH INC·Filed 2017·Granted Apr 9, 2019·0 cites·12 claims
- 3552US2017330725A1Lanthanated tungsten ion source and beamline componentsAXCELIS TECH INC·Filed 2017·Application pending·0 cites
- 3650US9978555B2Ion source liner having a lip for ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted May 22, 2018·0 cites·20 claims
- 3750US2022013323A1Hydrogen co-gas when using a chlorine-based ion source materialAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 3849US11756772B2System and method for extending a lifetime of an ion source for molecular carbon implantsAXCELIS TECH INC·Filed 2020·Granted Sep 12, 2023·0 cites·20 claims
- 3949US10361081B2Phosphine co-gas for carbon implantsAXCELIS TECH INC·Filed 2017·Granted Jul 23, 2019·0 cites·13 claims
- 4046US8242469B2Adjustable louvered plasma electron flood enclosureCOLVIN NEIL K·Filed 2010·Granted Aug 14, 2012·0 cites·23 claims
- 4145US2015357151A1Ion implantation source with textured interior surfacesAXCELIS TECH INC·Filed 2014·Application pending·0 cites
- 4244US9941087B2Ion source cathode shieldAXCELIS TECH INC·Filed 2017·Granted Apr 10, 2018·0 cites·16 claims
- 4342US2014319994A1Flourine and HF Resistant Seals for an Ion SourceCOLVIN NEIL K·Filed 2013·Application pending·0 cites
- 4441US9805912B2Hydrogen COGas for carbon implantCOLVIN NEIL K·Filed 2010·Granted Oct 31, 2017·0 cites·19 claims
- 4539US9984855B2Implementation of co-gases for germanium and boron ion implantsCOLVIN NEIL K·Filed 2010·Granted May 29, 2018·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →