Inventor · disambiguated record
Nozomu Hayashi
Also filed as: HAYASHI NOZOMU
19 granted patents·3 pending applications·30 citations·filing 2002–2024
90Inventor score
Top patents by PatentIndex Score
22 records- 0188US7672000B2Position detecting method and apparatusCANON KK·Filed 2006·Granted Mar 2, 2010·10 cites·13 claims
- 0276US8885164B2Exposure method, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2013·Granted Nov 11, 2014·2 cites·8 claims
- 0375US7126670B2Position measurement techniqueCANON KK·Filed 2005·Granted Oct 24, 2006·4 cites·27 claims
- 0467US2025044714A1Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0566US9703190B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2013·Granted Jul 11, 2017·1 cites·13 claims
- 0666US8390809B2Exposure method, exposure apparatus, and method of manufacturing deviceHAYASHI NOZOMU·Filed 2009·Granted Mar 5, 2013·2 cites·18 claims
- 0766US6762825B2Focal point position detecting method in semiconductor exposure apparatusCANON KK·Filed 2002·Granted Jul 13, 2004·8 cites·16 claims
- 0865US2024210843A1Control apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2023·Application pending·0 cites
- 0963US10732522B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2016·Granted Aug 4, 2020·1 cites·27 claims
- 1060US11833737B2Imprint apparatus, method of imprinting, and method of manufacturing articleCANON KK·Filed 2022·Granted Dec 5, 2023·0 cites·8 claims
- 1160US7453570B2Mark position measuring method and apparatusCANON KK·Filed 2007·Granted Nov 18, 2008·1 cites·7 claims
- 1250US11841616B2Imprint apparatus, imprint method, and method of manufacturing articleCANON KK·Filed 2020·Granted Dec 12, 2023·0 cites·5 claims
- 1348US8638370B2Apparatus and method of processing substrate containing mark and method of manufacturing deviceHAYASHI NOZOMU·Filed 2010·Granted Jan 28, 2014·0 cites·6 claims
- 1447US7675632B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Mar 9, 2010·0 cites·5 claims
- 1547US7495780B2Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing methodCANON KK·Filed 2007·Granted Feb 24, 2009·0 cites·2 claims
- 1645US10777440B2Detection device, imprint apparatus, planarization device, detection method, and article manufacturing methodCANON KK·Filed 2019·Granted Sep 15, 2020·0 cites·19 claims
- 1745US9261776B2Imprint apparatus, and method of manufacturing articleHAYASHI NOZOMU·Filed 2012·Granted Feb 16, 2016·0 cites·10 claims
- 1845US8369604B2Position detector, position detection method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Feb 5, 2013·0 cites·9 claims
- 1943US10901324B2Imprint method, imprint apparatus, and article manufacturing method using the sameCANON KK·Filed 2013·Granted Jan 26, 2021·0 cites·12 claims
- 2043US7310146B2Mark position measuring method and apparatusCANON KK·Filed 2004·Granted Dec 18, 2007·1 cites·11 claims
- 2142US7145666B2Position detecting method and apparatusCANON KK·Filed 2004·Granted Dec 5, 2006·0 cites·8 claims
- 2237US2011074064A1Imprint apparatus and product manufacturing methodCANON KK·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →