Inventor · disambiguated record
Nobuyuki Irie
Also filed as: IRIE NOBUYUKI
15 granted patents·3 pending applications·796 citations·filing 1994–2004
95Inventor score
Top patents by PatentIndex Score
18 records- 0196US6337162B1Method of exposure, photomask, method of production of photomask, microdevice, and method of production of microdeviceNIKON CORP·Filed 2000·Granted Jan 8, 2002·91 cites·64 claims
- 0295US6118516AProjection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patternsNIKON CORP·Filed 1997·Granted Sep 12, 2000·134 cites·35 claims
- 0394US6842225B1Exposure apparatus, microdevice, photomask, method of exposure, and method of production of deviceNIKON CORP·Filed 2000·Granted Jan 11, 2005·70 cites·59 claims
- 0494US5525808AAlignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positionsNIKON CORPORATON·Filed 1994·Granted Jun 11, 1996·205 cites·57 claims
- 0589US5808910AAlignment methodNIKON CORP·Filed 1996·Granted Sep 15, 1998·78 cites·17 claims
- 0685US7001674B2Exposure method, exposure apparatus, and method of production of deviceNIKON CORP·Filed 2003·Granted Feb 21, 2006·24 cites·30 claims
- 0785US5596204AMethod for aligning processing areas on a substrate with a predetermined position in a static coordinate systemNIKON CORP·Filed 1994·Granted Jan 21, 1997·47 cites·24 claims
- 0883US6710847B1Exposure method and exposure apparatusNIKON CORP·Filed 1999·Granted Mar 23, 2004·44 cites·25 claims
- 0978US6607863B2Exposure method of production of density filterNIKON CORP·Filed 2001·Granted Aug 19, 2003·22 cites·38 claims
- 1072US6606145B2Exposure apparatus, microdevice, photomask, and exposure methodNIKON CORP·Filed 2001·Granted Aug 12, 2003·18 cites·27 claims
- 1168US6731029B2Canned linear motorYASKAWA DENKI SEISAKUSHO KK·Filed 2001·Granted May 4, 2004·15 cites·8 claims
- 1265US6262491B1Control system for hybrid vehicleHONDA MOTOR CO LTD·Filed 1999·Granted Jul 17, 2001·33 cites·14 claims
- 1360US6800968B1Linear motorYASKAWA DENKI SEISAKUSHO KK·Filed 2000·Granted Oct 5, 2004·10 cites·1 claims
- 1453US7034922B2Exposure apparatus and exposure methodNIKON CORP·Filed 2004·Granted Apr 25, 2006·3 cites·24 claims
- 1545US7531923B2Coreless linear motorYASKAWA DENKI SEISAKUSHO KK·Filed 2003·Granted May 12, 2009·2 cites·4 claims
- 1641US2004070740A1Exposure method and exposure apparatusNIKON CORP·Filed 2003·Application pending·0 cites
- 1737US2003138742A1Exposure method and exposure apparatusNIKON CORP·Filed 2002·Application pending·0 cites
- 1836US2001055733A1Exposure method and exposure apparatusNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →