Inventor · disambiguated record
Nobusige Korenaga
Also filed as: KORENAGA NOBUSIGE
3 granted patents·178 citations·filing 1992–1994
77Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0192US5608773AMask holding device, and an exposure apparatus and a device manufacturing method using the deviceCANON KK·Filed 1994·Granted Mar 4, 1997·90 cites·25 claims
- 0282US5402680AVelocity sensor and semiconductor exposing apparatus using such a sensorCANON KK·Filed 1992·Granted Apr 4, 1995·53 cites·8 claims
- 0379US5518550AStage apparatus for an exposure apparatus including a contant tension spring for canceling out a gravitational force of a movable stage by a tensile forceCANON KK·Filed 1994·Granted May 21, 1996·35 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →