Inventor · disambiguated record
Noboru Osaka
Also filed as: OSAKA NOBORU
10 granted patents·6 citations·filing 2007–2020
79Inventor score
Top patents by PatentIndex Score
10 records- 0175US7602474B2Exposure apparatusCANON KK·Filed 2007·Granted Oct 13, 2009·4 cites·3 claims
- 0271US11255514B2Illumination apparatus having planar array of LEDs and movable pair of lens arrays for modifying light outputCANON KK·Filed 2020·Granted Feb 22, 2022·1 cites·19 claims
- 0361US9966245B2Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted May 8, 2018·1 cites·9 claims
- 0455US11320741B2Light source apparatus, illumination apparatus, exposure apparatus, and method for manufacturing objectCANON KK·Filed 2019·Granted May 3, 2022·0 cites·8 claims
- 0551US11698589B2Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing articleCANON KK·Filed 2020·Granted Jul 11, 2023·0 cites·11 claims
- 0648US7843645B2Projection optical system, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2008·Granted Nov 30, 2010·0 cites·5 claims
- 0747US10761434B2Substrate holding apparatus, exposure apparatus, and article manufacturing methodCANON KK·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 0847US10698319B2Exposure apparatus, exposure method, and article manufacturing methodCANON KK·Filed 2019·Granted Jun 30, 2020·0 cites·11 claims
- 0933US9280054B2Illumination optical system, exposure apparatus, and method of manufacturing deviceOSAKA NOBORU·Filed 2012·Granted Mar 8, 2016·0 cites·11 claims
- 1031US9632423B2Illumination device, exposure apparatus, adjusting method, and method for manufacturing objectCANON KK·Filed 2015·Granted Apr 25, 2017·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →