Inventor · disambiguated record
Noritoshi Sakamoto
Also filed as: SAKAMOTO NORITOSHI
7 granted patents·19 citations·filing 2010–2019
77Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0188US10545413B2Evaluation method, exposure method, and method for manufacturing an articleCANON KK·Filed 2019·Granted Jan 28, 2020·5 cites·9 claims
- 0288US8149423B2Position detection apparatus, exposure apparatus, and method of manufacturing deviceSAKAMOTO NORITOSHI·Filed 2010·Granted Apr 3, 2012·11 cites·6 claims
- 0379US10455160B2Detecting apparatus, detecting method, computer-readable medium storing a program, lithography apparatus, and article manufacturing method that control imaging device to perform imaging at particular time periodCANON KK·Filed 2017·Granted Oct 22, 2019·2 cites·16 claims
- 0465US9097991B2Exposure apparatus, method of controlling the same and method of manufacturing deviceCANON KK·Filed 2013·Granted Aug 4, 2015·1 cites·11 claims
- 0547US8259310B2Position detection apparatus, exposure apparatus, and method of manufacturing deviceSAKAMOTO NORITOSHI·Filed 2012·Granted Sep 4, 2012·0 cites·5 claims
- 0641US9036131B2Exposure apparatus and device fabrication methodSAKAMOTO NORITOSHI·Filed 2012·Granted May 19, 2015·0 cites·21 claims
- 0740US9400437B2Position measurement apparatus and exposure apparatus which measure position of object using reference mark, and method of manufacturing deviceCANON KK·Filed 2012·Granted Jul 26, 2016·0 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →