Inventor · disambiguated record
Noriyuki Sakuma
Also filed as: SAKUMA NORIYUKI
56 granted patents·21 pending applications·1,117 citations·filing 1984–2023
98Inventor score
Files withHITACHI LTD39HITACHI HIGH TECH CORP11RENESAS TECH CORP9HITACHI AUTOMOTIVE SYSTEMS LTD6SAKUMA NORIYUKI4
Top patents by PatentIndex Score
77 records- 0198US6117775APolishing methodHITACHI LTD·Filed 1998·Granted Sep 12, 2000·254 cites·50 claims
- 0296US6562719B2Methods of polishing, interconnect-fabrication, and producing semiconductor devicesHITACHI LTD·Filed 2001·Granted May 13, 2003·88 cites·20 claims
- 0395US4891684ASemiconductor deviceHITACHI LTD·Filed 1987·Granted Jan 2, 1990·84 cites·39 claims
- 0493US6899603B2Polishing apparatusRENESAS TECH CORP·Filed 2004·Granted May 31, 2005·37 cites·14 claims
- 0592US6561883B1Method of polishingHITACHI LTD·Filed 2000·Granted May 13, 2003·59 cites·21 claims
- 0691US6774041B1Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor deviceRENESAS TECH CORP·Filed 2000·Granted Aug 10, 2004·52 cites·21 claims
- 0790US6326299B1Method for manufacturing a semiconductor deviceHITACHI LTD·Filed 1999·Granted Dec 4, 2001·88 cites·45 claims
- 0889US8468883B2Thermal type flow sensor having a humidity detection portion and an air flow detecting portionSAKUMA NORIYUKI·Filed 2010·Granted Jun 25, 2013·10 cites·15 claims
- 0989US6596638B1Polishing methodHITACHI LTD·Filed 2000·Granted Jul 22, 2003·33 cites·41 claims
- 1087US7673508B2Thermal type fluid flow sensorHITACHI LTD·Filed 2007·Granted Mar 9, 2010·14 cites·15 claims
- 1187US6750128B2Methods of polishing, interconnect-fabrication, and producing semiconductor devicesRENESAS TECH CORP·Filed 2003·Granted Jun 15, 2004·34 cites·12 claims
- 1286US6565422B1Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatusHITACHI LTD·Filed 2000·Granted May 20, 2003·29 cites·21 claims
- 1384US9958472B2Inertial sensorHITACHI LTD·Filed 2015·Granted May 1, 2018·3 cites·5 claims
- 1484US6358838B2Semiconductor device and process for producing the sameHITACHI LTD·Filed 2001·Granted Mar 19, 2002·27 cites·23 claims
- 1583US4636833ASemiconductor deviceHITACHI LTD·Filed 1984·Granted Jan 13, 1987·34 cites·24 claims
- 1682US6905571B2Wafer polishing method and wafer polishing apparatus in semiconductor fabrication equipmentELPIDA MEMORY INC·Filed 2003·Granted Jun 14, 2005·31 cites·8 claims
- 1781US6638854B2Semiconductor device and method for manufacturing the sameHITACHI LTD·Filed 2002·Granted Oct 28, 2003·25 cites·16 claims
- 1881US6561875B1Apparatus and method for producing substrate with electrical wire thereonHITACHI LTD·Filed 2000·Granted May 13, 2003·20 cites·26 claims
- 1980US8714008B2Thermal fluid flow sensor and method of manufacturing the sameSAKUMA NORIYUKI·Filed 2012·Granted May 6, 2014·5 cites·10 claims
- 2080US6719618B2Polishing apparatusRENESAS TECH CORP·Filed 2001·Granted Apr 13, 2004·17 cites·15 claims
- 2177US7404320B2Flow sensor using a heat element and a resistance temperature detector formed of a metal filmHITACHI LTD·Filed 2006·Granted Jul 29, 2008·8 cites·32 claims
- 2277US4937650ASemiconductor capacitor device with dual dielectricHITACHI LTD·Filed 1988·Granted Jun 26, 1990·39 cites·18 claims
- 2376US8429964B2Thermal fluid flow sensor having stacked insulating films above and below heater and temperature-measuring resistive elementsSAKUMA NORIYUKI·Filed 2009·Granted Apr 30, 2013·9 cites·18 claims
- 2476US5079191AProcess for producing a semiconductor deviceHITACHI LTD·Filed 1990·Granted Jan 7, 1992·39 cites·17 claims
- 2575US6680541B2Semiconductor device and process for producing the sameHITACHI LTD·Filed 2002·Granted Jan 20, 2004·15 cites·8 claims
- 2674US7621180B2Flow sensor with metal film resistorHITACHI LTD·Filed 2009·Granted Nov 24, 2009·8 cites·15 claims
- 2773US10697995B2Acceleration sensor including improved mass bodyHITACHI LTD·Filed 2018·Granted Jun 30, 2020·1 cites·7 claims
- 2873US9851233B2Physical quantity sensorHITACHI AUTOMOTIVE SYSTEMS LTD·Filed 2013·Granted Dec 26, 2017·3 cites·12 claims
- 2973US7279425B2Polishing methodHITACHI LTD·Filed 2006·Granted Oct 9, 2007·2 cites·27 claims
- 3071US10527642B2Acceleration sensorHITACHI LTD·Filed 2014·Granted Jan 7, 2020·2 cites·3 claims
- 3171US6815357B2Process and apparatus for manufacturing a semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Nov 9, 2004·16 cites·25 claims
- 3270US10802040B2Acceleration sensorHITACHI LTD·Filed 2016·Granted Oct 13, 2020·1 cites·12 claims
- 3369US2023369628A1Fuel Cell StackHITACHI LTD·Filed 2023·Application pending·0 cites
- 3468US7886594B2Thermal type fluid flow sensor with metal film resistorHITACHI LTD·Filed 2010·Granted Feb 15, 2011·2 cites·22 claims
- 3568US2023327164A1Fuel cell and fuel cell stackHITACHI LTD·Filed 2023·Application pending·0 cites
- 3666USRE43660EFlow sensor using a heat element and a resistance temperature detector formed of a metal filmSAKUMA NORIYUKI·Filed 2010·Granted Sep 18, 2012·1 cites·50 claims
- 3765US7816702B2Semiconductor deviceHITACHI LTD·Filed 2008·Granted Oct 19, 2010·2 cites·11 claims
- 3864US11417892B2Fuel cellHITACHI HIGH TECH CORP·Filed 2018·Granted Aug 16, 2022·0 cites·15 claims
- 3962US2024120520A1Fuel battery cell and manufacturing method thereforHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 4060US7132367B2Polishing methodHITACHI LTD·Filed 2003·Granted Nov 7, 2006·4 cites·58 claims
- 4159US2017322062A1Thermal Air Flow SensorHITACHI AUTOMOTIVE SYSTEMS LTD·Filed 2017·Application pending·0 cites
- 4258US2023127271A1Fuel Cell and Method for Producing SameHITACHI HIGH TECH CORP·Filed 2020·Application pending·0 cites
- 4356US11855318B2Fuel battery cell, fuel battery system, leak detection methodHITACHI HIGH TECH CORP·Filed 2019·Granted Dec 26, 2023·0 cites·13 claims
- 4456US7563716B2Polishing methodRENESAS TECH CORP·Filed 2007·Granted Jul 21, 2009·0 cites·5 claims
- 4556US6855035B2Apparatus and method for producing substrate with electrical wire thereonRENESAS TECH CORP·Filed 2002·Granted Feb 15, 2005·5 cites·42 claims
- 4655US10160644B1Manufacturing method of MEMS sensorHITACHI LTD·Filed 2018·Granted Dec 25, 2018·0 cites·15 claims
- 4754US9379302B2Method of manufacturing the thermal fluid flow sensorHITACHI AUTOMOTIVE SYSTEMS LTD·Filed 2014·Granted Jun 28, 2016·0 cites·5 claims
- 4854US7183212B2Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor deviceRENESAS TECH CORP·Filed 2004·Granted Feb 27, 2007·3 cites·18 claims
- 4953US10802041B2Acceleration sensorHITACHI LTD·Filed 2018·Granted Oct 13, 2020·0 cites·7 claims
- 5052US2022393215A1Fuel Cell, Fuel Cell System and Method for Producing Fuel CellHITACHI HIGH TECH CORP·Filed 2019·Application pending·0 cites
Showing the top 50 of 77 patent records by PatentIndex Score.
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