Inventor · disambiguated record
Norio Shiraiwa
Also filed as: SHIRAIWA NORIO
15 granted patents·3 pending applications·29 citations·filing 2007–2025
88Inventor score
Top patents by PatentIndex Score
18 records- 0186US9240340B2Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2013·Granted Jan 19, 2016·10 cites·11 claims
- 0280US10304718B2Electrostatic chuck deviceSHINKO ELECTRIC IND CO·Filed 2016·Granted May 28, 2019·3 cites·8 claims
- 0377US10147628B2Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Dec 4, 2018·3 cites·7 claims
- 0476US8724289B2Substrate temperature adjusting-fixing deviceSHIRAIWA NORIO·Filed 2012·Granted May 13, 2014·5 cites·6 claims
- 0573US12291780B2Tray and substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2023·Granted May 6, 2025·0 cites·10 claims
- 0671US10600669B2Substrate fixture and substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2018·Granted Mar 24, 2020·1 cites·6 claims
- 0768US9252039B2Electrostatic chuck apparatusSHINKO ELECTRIC IND CO·Filed 2014·Granted Feb 2, 2016·2 cites·8 claims
- 0868US9120704B2Dielectric layer for electrostatic chuck and electrostatic chuckNIPPON TUNGSTEN·Filed 2013·Granted Sep 1, 2015·2 cites·10 claims
- 0961US8023246B2Electrostatic chuck and method of manufacturing the sameSHINKO ELECTRIC IND CO·Filed 2008·Granted Sep 20, 2011·1 cites·10 claims
- 1060US11862501B2Electrostatic chuck and substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2021·Granted Jan 2, 2024·0 cites·5 claims
- 1158US11037811B2Electrostatic chuck and semiconductor/liquid crystal manufacturing equipmentSHIRAIWA NORIO·Filed 2012·Granted Jun 15, 2021·1 cites·4 claims
- 1258US2025336707A1Electrostatic chuck and substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2025·Application pending·0 cites
- 1358US2025323025A1Substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2025·Application pending·0 cites
- 1455US9660557B2Electrostatic chuck and method for manufacturing the electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2013·Granted May 23, 2017·1 cites·10 claims
- 1546US2008266747A1Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
- 1645US7483256B2Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2007·Granted Jan 27, 2009·0 cites·7 claims
- 1741US9837297B2Tray and wafer holding apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Dec 5, 2017·0 cites·13 claims
- 1832US10847401B2Wafer holding apparatus and baseplate structureSHINKO ELECTRIC IND CO·Filed 2017·Granted Nov 24, 2020·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →