Inventor · disambiguated record
Nobuyoshi Tanno
Also filed as: TANNO NOBUYOSHI
3 granted patents·1 pending application·509 citations·filing 2000–2011
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0196US6432849B1Substrate storage cassette positioning device and methodNIKON CORP·Filed 2000·Granted Aug 13, 2002·505 cites·16 claims
- 0266US8755025B2Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating methodTANNO NOBUYOSHI·Filed 2011·Granted Jun 17, 2014·2 cites·8 claims
- 0366US7898645B2Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating methodZAO NIKON CO LTD·Filed 2006·Granted Mar 1, 2011·2 cites·18 claims
- 0450US2007052942A1Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating methodNIKON CORP·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Nobuyoshi Tanno files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →