Inventor · disambiguated record
Noriaki Tateno
Also filed as: TATENO NORIAKI
5 granted patents·128 citations·filing 1974–2004
80Inventor score
Top patents by PatentIndex Score
5 records- 0189US6768627B1Electrostatic chuck and processing apparatus for insulative substrateTOTO LTD·Filed 2000·Granted Jul 27, 2004·63 cites·25 claims
- 0283US7209339B2Electrostatic chuck for an electrically insulative substrate, and a method of using sameTOTO LTD·Filed 2004·Granted Apr 24, 2007·30 cites·19 claims
- 0380US7615133B2Electrostatic chuck module and cooling systemTOTO LTD·Filed 2002·Granted Nov 10, 2009·33 cites·8 claims
- 0431US7011744B2Brine supply unitANELVA CORP·Filed 2002·Granted Mar 14, 2006·0 cites·7 claims
- 0530US3965140AProcess for the preparation of hydroxyl-terminated liquid polymersYOKOHAMA RUBBER CO LTD·Filed 1974·Granted Jun 22, 1976·2 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →