Inventor · disambiguated record
Oliver Kienzle
Also filed as: KIENZLE OLIVER
19 granted patents·414 citations·filing 2001–2017
95Inventor score
Files withZEISS CARL NTS GMBH5ZEISS CARL SMT AG4ZEISS CARL MICROSCOPY GMBH3KNIPPELMEYER RAINER2APPLIED MATERIALS ISRAEL1
Top patents by PatentIndex Score
19 records- 0197US7244949B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL·Filed 2006·Granted Jul 17, 2007·210 cites·24 claims
- 0296US9224576B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Dec 29, 2015·18 cites·10 claims
- 0396US7554094B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsCARL ZEISS SMT A G·Filed 2007·Granted Jun 30, 2009·29 cites·23 claims
- 0494US9673024B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 6, 2017·9 cites·15 claims
- 0593US8637834B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2011·Granted Jan 28, 2014·17 cites·21 claims
- 0693US8097847B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2009·Granted Jan 17, 2012·16 cites·12 claims
- 0789US10504681B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 10, 2019·3 cites·14 claims
- 0882US6878936B2Applications operating with beams of charged particlesZEISS CARL NTS GMBH·Filed 2003·Granted Apr 12, 2005·17 cites·40 claims
- 0978US6903337B2Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the sameZEISS CARL SMT AG·Filed 2002·Granted Jun 7, 2005·15 cites·34 claims
- 1078US6642525B2Particle-optical component and system comprising a particle-optical componentZEISS CARL SMT AG·Filed 2001·Granted Nov 4, 2003·18 cites·64 claims
- 1177US7916930B2Method and arrangement for repairing photolithography masksZEISS CARL SMS GMBH·Filed 2007·Granted Mar 29, 2011·5 cites·13 claims
- 1277US6946657B2Electron microscopy systemZEISS CARL NTS GMBH·Filed 2003·Granted Sep 20, 2005·13 cites·20 claims
- 1375US6967328B2Method for the electron-microscopic observation of a semiconductor arrangement and apparatus thereforZEISS CARL NTS GMBH·Filed 2003·Granted Nov 22, 2005·18 cites·21 claims
- 1473US7135677B2Beam guiding arrangement, imaging method, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Nov 14, 2006·11 cites·44 claims
- 1572US6914249B2Particle-optical apparatus, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Jul 5, 2005·9 cites·21 claims
- 1666US6756599B2Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the sameZEISS CARL SMT AG·Filed 2002·Granted Jun 29, 2004·6 cites·17 claims
- 1735US8268516B2Method for repairing phase shift masksZIBOLD AXEL·Filed 2008·Granted Sep 18, 2012·0 cites·20 claims
- 1834US8264535B2Method and apparatus for analyzing a group of photolithographic masksKIENZLE OLIVER·Filed 2008·Granted Sep 11, 2012·0 cites·20 claims
- 1928US7015487B2Apparatus and method for exposing a radiation sensitive layer by means of charged particles as well as a mask for this purposeZEISS CARL SMT AG·Filed 2001·Granted Mar 21, 2006·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →