Inventor · disambiguated record
Osamu Kakuchi
Also filed as: KAKUCHI OSAMU
12 granted patents·2 pending applications·212 citations·filing 1987–2010
91Inventor score
Top patents by PatentIndex Score
14 records- 0192US5087121ADepth/height measuring deviceCANON KK·Filed 1990·Granted Feb 11, 1992·84 cites·37 claims
- 0290US6633362B2Projection exposure apparatusCANON KK·Filed 2000·Granted Oct 14, 2003·28 cites·21 claims
- 0388US6614535B1Exposure apparatus with interferometerCANON KK·Filed 2000·Granted Sep 2, 2003·33 cites·15 claims
- 0486US7276717B2Measuring apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Oct 2, 2007·9 cites·18 claims
- 0580US7236254B2Exposure apparatus with interferometerCANON KK·Filed 2006·Granted Jun 26, 2007·8 cites·9 claims
- 0673US4850709AFabri-perot spectroscopy method and apparatus utilizing the sameCANON KK·Filed 1987·Granted Jul 25, 1989·33 cites·9 claims
- 0770US7773233B2Method of measuring wavefront retardance aberration based on wavefront and birefringent characteristicsCANON KK·Filed 2008·Granted Aug 10, 2010·2 cites·6 claims
- 0863US7095509B2Aberration measuring method for projection optical system with a variable numerical aperture in an exposure apparatusCANON KK·Filed 2004·Granted Aug 22, 2006·6 cites·2 claims
- 0961US7023561B2Exposure apparatus with interferometerCANON KK·Filed 2003·Granted Apr 4, 2006·7 cites·16 claims
- 1051US7907263B2Apparatuses and methods using measurement of a flare generated in an optical systemCANON KK·Filed 2009·Granted Mar 15, 2011·0 cites·6 claims
- 1151US6924881B2Projection exposure apparatusCANON KK·Filed 2003·Granted Aug 2, 2005·2 cites·14 claims
- 1249US7995213B2Measurement method, measurement apparatus, exposure apparatus, and device fabrication methodCANON KK·Filed 2010·Granted Aug 9, 2011·0 cites·1 claims
- 1343US2006227334A1Aberration measuring method for projection optical system with a variable numerical aperture in an exposure apparatusKAKUCHI OSAMU·Filed 2006·Application pending·0 cites
- 1441US2009219494A1Evaluation method, evaluation apparatus, and exposure apparatusCANON KK·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →