Inventor · disambiguated record
Otto Koblinger
Also filed as: KOBLINGER OTTO
4 granted patents·124 citations·filing 1989–1995
79Inventor score
Files withIBM4
Top patents by PatentIndex Score
4 records- 0179US5109267AMethod for producing an integrated circuit structure with a dense multilayer metallization patternIBM·Filed 1991·Granted Apr 28, 1992·73 cites·19 claims
- 0260US4980317AMethod of producing integrated semiconductor structures comprising field-effect transistors with channel lengths in the submicron range using a three-layer resist systemIBM·Filed 1989·Granted Dec 25, 1990·20 cites·18 claims
- 0357US5055383AProcess for making masks with structures in the submicron rangeIBM·Filed 1989·Granted Oct 8, 1991·24 cites·14 claims
- 0427US5966633AMethod for providing a metallization layer on an insulating layer and for opening through holes in the said insulating layer using the same maskIBM·Filed 1995·Granted Oct 12, 1999·7 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →