Inventor · disambiguated record
Otto Lach
Also filed as: LACH OTTO
7 granted patents·1 pending application·42 citations·filing 2009–2012
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0186US9190310B2Grounded chuckBRUGGER MICHAEL·Filed 2010·Granted Nov 17, 2015·10 cites·17 claims
- 0284US8608146B2Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pinBRUGGER MICHAEL·Filed 2009·Granted Dec 17, 2013·14 cites·15 claims
- 0382US9147593B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2012·Granted Sep 29, 2015·6 cites·15 claims
- 0482US9093482B2Method and apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2012·Granted Jul 28, 2015·6 cites·14 claims
- 0570US9484229B2Device and method for processing wafer-shaped articlesLACH OTTO·Filed 2011·Granted Nov 1, 2016·5 cites·9 claims
- 0662US9130002B2Device for holding wafer shaped articlesFRANK DIETER·Filed 2010·Granted Sep 8, 2015·1 cites·19 claims
- 0748US8613288B2High temperature chuck and method of using sameBRUGGER MICHAEL·Filed 2009·Granted Dec 24, 2013·0 cites·10 claims
- 0824US2012305036A1Device for treating surfaces of wafer-shaped articlesLACH OTTO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →