Inventor · disambiguated record
Paul Bennett
Also filed as: BENNETT PAUL · BENNETT PAUL G · BENNETT PAUL GEORGE
13 granted patents·484 citations·filing 1999–2019
92Inventor score
Files withENI TECHNOLOGY INC4SPTS TECHNOLOGIES LTD3MKS INSTR INC2ANSELL OLIVER1AVIZA TECHNOLOGY LIMTED1
Top patents by PatentIndex Score
13 records- 0198US6469919B1Power supplies having protection circuitsENI TECHNOLOGY INC·Filed 2000·Granted Oct 22, 2002·271 cites·62 claims
- 0290US7397676B2Class E amplifier with inductive clampMKS INSTR INC·Filed 2007·Granted Jul 8, 2008·29 cites·20 claims
- 0387US7180758B2Class E amplifier with inductive clampMKS INSTR INC·Filed 2004·Granted Feb 20, 2007·51 cites·33 claims
- 0487US6495963B1Inductive coil assembly having multiple coil segments for plasma processing apparatusTRIKON HOLDINGS LTD·Filed 1999·Granted Dec 17, 2002·54 cites·20 claims
- 0584US6618276B2Power supplies having protection circuitsENI TECHNOLOGY INC·Filed 2002·Granted Sep 9, 2003·42 cites·20 claims
- 0676US6885567B2Class E amplifier with inductive clampENI TECHNOLOGY INC·Filed 2003·Granted Apr 26, 2005·25 cites·21 claims
- 0772US11189463B2Plasma generating arrangementSPTS TECHNOLOGIES LTD·Filed 2019·Granted Nov 30, 2021·1 cites·20 claims
- 0862US6570777B1Half sine wave resonant drive circuitENI TECHNOLOGY INC·Filed 2001·Granted May 27, 2003·10 cites·24 claims
- 0951US9159599B2Apparatus for chemically etching a workpieceANSELL OLIVER·Filed 2010·Granted Oct 13, 2015·1 cites·17 claims
- 1050US10720308B2Plasma apparatusSPTS TECHNOLOGIES LTD·Filed 2019·Granted Jul 21, 2020·0 cites·22 claims
- 1145US10446374B2Plasma processing apparatusSPTS TECHNOLOGIES LTD·Filed 2017·Granted Oct 15, 2019·0 cites·22 claims
- 1241US7220943B2RF stand offsAVIZA TECHNOLOGY LIMTED·Filed 2005·Granted May 22, 2007·0 cites·19 claims
- 1335US8968535B2Ion beam sourceMACNEIL JOHN·Filed 2010·Granted Mar 3, 2015·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →